VLSI Technology Symposium – Imec Alternate 3D NAND Word Line Materials

VLSI Technology Symposium – Imec Alternate 3D NAND Word Line Materials
by Scotten Jones on 07-19-2021 at 6:00 am

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At the 2021 VLSI Technology Symposium, Imec presented on Ruthenium (Ru) and Molybdenum (Mo) as alternate Word Line (WL) materials for 3D NAND Flash “First Demonstration of Ruthenium and Molybdenum Word lines Integrated into 40nm Pitch 3D NAND Memory Devices”. I had an opportunity to interview one of the authors: Maarten Rosmeulen.… Read More


VLSI Technology Symposium – Imec Forksheet

VLSI Technology Symposium – Imec Forksheet
by Scotten Jones on 07-06-2021 at 6:00 am

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FinFETs devices are reaching their limits for scaling. Horizontal Nanosheets (HNS) are a type of Gate All Around (GAA) device that offers better scaling and performance per unit area. HNS is the logical next step from FinFETs because HNS processing is similar to FinFETs with a limited number of process changes required.

At the … Read More


VLSI Symposium – TSMC and Imec on Advanced Process and Devices Technology Toward 2nm

VLSI Symposium – TSMC and Imec on Advanced Process and Devices Technology Toward 2nm
by Scotten Jones on 07-02-2021 at 6:00 am

Figure 1

At the 2021 Symposium on VLSI Technology and Circuits in June a short course was held on “Advanced Process and Devices Technology Toward 2nm-CMOS and Emerging Memory”. In this article I will review the first two presentations covering leading edge logic devices. The two presentations are complementary and provide and excellent… Read More


LEAP INTO THE FUTURE OF PHOTONICS

LEAP INTO THE FUTURE OF PHOTONICS
by Daniel Nenni on 02-23-2021 at 8:00 am

There’s no doubt about it. Photonics is rapidly gaining importance thanks to its proven potential for many diverse application areas & industries.
Imec Technology Forum Photonics is your No. 1 occasion to gain insights on –
pioneering R&D in silicon photonics, opto-electronics, photonics-based sensors and imaging,
Read More

IEDM 2020 – Imec Plenary talk

IEDM 2020 – Imec Plenary talk
by Scotten Jones on 01-08-2021 at 6:00 am

Imec Figure 1

On Monday morning at IEDM, Sri Samavedam of Imec opened the technical program with a plenary talk entitled “Future Logic Scaling: Towards Atomic Channels and Deconstructed Chips”. I am not generally a fan of plenary talks, I think the presenters often try to cover too much in their talks and end up not providing enough detail to be… Read More


VLSI Symposium 2020 – Imec Monolithic CFET

VLSI Symposium 2020 – Imec Monolithic CFET
by Scotten Jones on 09-13-2020 at 10:00 am

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The 2020 VLSI Technology Symposium was held as a virtual conference from June 14th through June 19th. At the symposium Imec gave an interesting paper on Monolithic CFET and I had a chance to interview one of the authors, Hiroaki Arimura.

It is well known in the industry that FinFETs (FF) are reaching the end of their scaling life. Samsung… Read More


SEMICON West – Applied Materials Selective Gap Fill Announcement

SEMICON West – Applied Materials Selective Gap Fill Announcement
by Scotten Jones on 08-17-2020 at 5:00 pm

Applied Materials Selective Gapfill July 2020 Page 02

At SEMICON West, Applied Materials announced a new selective gap fill tool to address the growing resistance issues in interconnect at small dimensions. I had the opportunity to discuss this new tool and the applications for it with Zhebo Chen global product manager in the Metal Deposition Products group at Applied Materials.… Read More


Imec Technology Forum and ASML

Imec Technology Forum and ASML
by Scotten Jones on 07-30-2020 at 6:00 am

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On Thursday July 9 Imec held a virtual technology forum. Imec is one of the premier research organizations working on semiconductor technology and their forums are always interesting. My area of interest is process technology and the following are my observation in that area from the forum.

Luc Van Den Hove
Luc Van Den Hove is the… Read More


VLSI Symposium 2020 – Imec Buried Power Rail

VLSI Symposium 2020 – Imec Buried Power Rail
by Scotten Jones on 07-26-2020 at 10:00 am

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The 2020 VLSI Technology Symposium was held as a virtual conference from June 14th through June 19th. At the symposium Imec gave an interesting paper on Buried Power Rails (BPR) and I had a chance to interview one of the authors, Anshul Gupta.

As logic devices continue to scale down metal pitch is reaching a limit. Imec defines a pitch… Read More