SPIE Advanced Lithography + Patterning

The event for emerging technology in the semiconductor industry

Attend and hear research, challenges, and breakthroughs as you gather with colleagues in San Jose

Join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

Five days of exciting content and connecting with your community

• Plenary talks
• Technical presentations
• Networking sessions
• Course offerings
• Exhibition

Program overview

Join your colleagues 26 February-2 March 2023 at The San Jose Convention Center. See below for details of what is included plus exhibition, course, and press registration. Review pricing, SPIE Membership discounts, and more.

For those paying via bank transfers or administrators registering one or more people:

Download the PDF registration form.

REGISTER HERE