The EUV Divide and Intel Foundry Services

The EUV Divide and Intel Foundry Services
by Scotten Jones on 03-23-2022 at 10:00 am

Intel IDM 2.0 Process Roadmap
The EUV Divide

I was recently updating an analysis I did last year that looked at EUV system supply and demand, while doing this I started thinking about Intel and their Fab portfolio.

If you look at Intel’s history as a microprocessor manufacturer, they are typically ramping up their newest process node (n), in volume production… Read More


CEO Interview: Aki Fujimura of D2S

CEO Interview: Aki Fujimura of D2S
by Daniel Nenni on 03-18-2022 at 6:00 am

ESD Alliance D2S Blog Post Image 1 1

Curvilinear Design Primer for Design, Packaging Communities

This interview was done by Bob Smith, Executive Director, ESD Alliance, a SEMI Technology Community.

Previously, Fujimura served as CTO at Cadence Design Systems and returned to Cadence for the second time through the acquisition of Simplex Solutions where he was… Read More


Horizontal, Vertical, and Slanted Line Shadowing Across Slit in Low-NA and High-NA EUV Lithography Systems

Horizontal, Vertical, and Slanted Line Shadowing Across Slit in Low-NA and High-NA EUV Lithography Systems
by Fred Chen on 01-11-2022 at 6:00 am

EUV shadowing across slit

EUV lithography systems continue to be the source of much hope for continuing the pace of increasing device density on wafers per Moore’s Law. Recently, although EUV systems were originally supposed to help the industry avoid much multipatterning, it has not turned out to be the case [1,2]. The main surprise has been the

Read More

Revisiting EUV Lithography: Post-Blur Stochastic Distributions

Revisiting EUV Lithography: Post-Blur Stochastic Distributions
by Fred Chen on 11-14-2021 at 10:00 am

Revisiting EUV Lithography Post Blur Stochastic Distributions

In previous articles, I had looked at EUV stochastic behavior [1-2], primarily in terms of the low photon density resulting in shot noise, described by the Poisson distribution [3]. The role of blur to help combat the randomness of EUV photon absorption and secondary electron generation and migration was also recently considered… Read More


KLAC- Foundry/Logic Drives Outperformance- No Supply Chain Woes- Nice Beat

KLAC- Foundry/Logic Drives Outperformance- No Supply Chain Woes- Nice Beat
by Robert Maire on 11-04-2021 at 8:00 am

KLAC Tencor SemiWiki

KLA- great quarter driven by continued strong foundry/logic
No supply chain hiccups- Riding high in the cycle
Wafer inspection remains driver with rest along for the ride
Financials remain best in industry

A superb quarter
There was little to complain about in the quarter. Revenues of $2.1B and EPS of $4.64, both nicely beating… Read More


The Challenge of Working with EUV Doses

The Challenge of Working with EUV Doses
by Fred Chen on 10-25-2021 at 2:00 pm

The Challenge of Working with EUV Doses

Recently, a patent application from TSMC [1] revealed target EUV doses used in the range of 30-45 mJ/cm2. However, it was also acknowledged in the same application that such doses were too low to prevent defects and roughness. Recent studies [2,3] have shown that by considering photon density along with blur, the associated shot… Read More


Blur, not Wavelength, Determines Resolution at Advanced Nodes

Blur, not Wavelength, Determines Resolution at Advanced Nodes
by Fred Chen on 10-05-2021 at 10:00 am

Blur not Wavelength Determines Resolution at Advanced Nodes

Lithography has been the driving force for shrinking feature sizes for decades, and the most easily identified factor behind this trend is the reduction of wavelength. G-line (436 nm wavelength) was used for 0.5 um in the late 1980s [1], and I-line (365 nm wavelength) was used down to 0.3 um in the 1990s [2]. Then began the era of deep-ultraviolet… Read More


Cautions In Using High-NA EUV

Cautions In Using High-NA EUV
by Fred Chen on 09-22-2021 at 6:00 am

Cautions In Using High NA EUV

High-NA EUV has received a lot of attention ever since Intel put the spotlight on its receiving the first 0.55 NA EUV tool from ASML [1], expected in 2025. EUV itself has numerous issues which have been enumerated by myself and others, most notoriously the stochastic defects issue. There are also a host of issues related to the propagation… Read More


KLA – Chip process control outgrowing fabrication tools as capacity needs grow

KLA – Chip process control outgrowing fabrication tools as capacity needs grow
by Robert Maire on 08-01-2021 at 10:00 am

KLA Tencor SemiWiki

-KLA dominates process control like ASML dominates litho
-Industry in “panic mode” over capacity drives process control
-Like others, KLA tool supplies are in demand & tight supply
-Balance of 2021 “filled out” – now booking for 2022

Solid numbers and very solid guide for a better second Read More


EDA in the Cloud – Now More Than Ever

EDA in the Cloud – Now More Than Ever
by Kalar Rajendiran on 07-27-2021 at 10:00 am

Screen Shot 2021 07 14 at 4.32.16 PM

A decade ago, many of us heard commentaries on how entrepreneurs were turned down by venture capitalists for not including a cloud strategy in their business plan, no matter what the core business was. Humorous punchlines such as, “It’s cloudy without any clouds” and “Add some cloud to your strategy and your future will be bright… Read More