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The mean-free path for electrons in unbounded pure metals is as long as 68 nm which may exceed the length of a nanoscale circuit. However, surprisingly others have shown that the scattering of electrons at the outer cylindrical surface of a nanoscale wire, as well as at grain boundaries within...
None of the 1,000 SEMI standards address either scanning capacitance microscopy (SCM) or scanning spreading resistance microscopy (SSRM) which are essential in failure analysis for production support. I head a new SEMI working group addressing this problem which is now critical at and below the...