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It's a long existing problem that the current pellicle cannot survive high power EUV illumination, it's unclear if ASML can solve this...
Apr 17, 2024
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I guess you can mathematically do something like inverse transform to calculate what the exact wavefront at the mask surface should be...
Apr 12, 2024
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At this year's SPIE, there are indications current EUV masks have problems with the Ta-based absorbers, leading to image fading.
Image...
Apr 10, 2024
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High-NA EUV could very well be a bad decision. There is no High-NA EUV print data. But we have enough information from existing EUV to...
Apr 10, 2024
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Of course it's not only ppt, they reported some preliminary experiment results to show its feasibility. High-NA EUV is not the only...
Apr 10, 2024
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SPIE just published the papers from Advanced Lithography + Patterning. Here are a couple of pages, figures and table grasped from the 7x...
Apr 10, 2024
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This is only my opinion: if the metal pitch is in the middle of 40-28nm (say 34nm), the via alignment margin probably is still ok, but...
Apr 7, 2024
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Sometimes they intended to say something to mislead people (including their own people). The practical paths seem to be: a) Keep BEOL...
Apr 6, 2024
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From what I know, their CFET study is on the very "conceptual" discussion, not even in the "pathfinding" stage. The real focus is still...
Apr 4, 2024
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Huawei‘s money seems to be unlimited and possibly backed by Xi and his party. SMIC is a different story, it doesn't appear to gain the...
Mar 31, 2024
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The very-high volume products such as smartphones (e.g., iPhones) and non-AI PC are still allowed to enter China, but anything related...
Mar 30, 2024
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If we mainly consider the economy or yield of advanced-node high volume IC, yes, we can understand what's going on in Taiwan, US, etc...
Mar 30, 2024
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The provided link doesn’t seem to work. It’s unclear what was posted in Tom’s Hardware. You mean 4nm? or what else?
Mar 29, 2024
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It looks a lot of social news such as 知乎 about Huawei patents in Chinese local-net have been blocked (404, only a few produced by...
Mar 28, 2024
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It is still on the early stage of process development. This paper reported some preliminary experimental results of a simplified grating...
Mar 27, 2024