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Recent content by SteveD

  1. S

    TSMC statement on next-generation EUV

    Since A16 was initially defined as N2P + backside power, it makes sense that it doesn't use High-NA EUV.
  2. S

    Huawei Patent Shows 6x Multi-Patterning Surpassing EUV Resolution Without EUV

    In the EUV-vs-DUV cost debate, we should also consider that EUV saves on cycle time. In the R&D phase, especially, it is important to get quick learning and to avoid long cycle times. One EUV layer may not make a big difference, but if a flow contains too many multiple exposures, the latter will...
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