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EUV lithography is widely perceived to be the obvious choice to replace DUV lithography due to the shorter wavelength(s) used. However, there’s a devil in the details, or a catch if you will.
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I was scheduled to attend the Mentor tutorial at DVCon this year. Then coronavirus hit, two big sponsors dropped out and the schedule was shortened to three days. Mentor’s tutorial had to be moved to Wednesday and, as luck would have it, I already had commitments on that day. Mentor kindly sent me the slides and audio from the meeting… Read More
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Why ASML Is Racing to Build 110 EUV Machines