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Intel EUV Photoresist Progress and ASML High NA EUV

Intel EUV Photoresist Progress and ASML High NA EUV
by Scotten Jones on 03-10-2016 at 4:00 pm

SPIE Days 3 and 4:

Anna Lio of Intel presented EUV resists: What’s next?

Intel wants to insert EUV at 7nm but it has to be ready and economical. Critical Dimension Uniformity (CDU), Line Width Roughness (LWR) and edge placement/stochastics are all stable on 22nm, 14nm and 10nm pilot lines.… Read More


EUV sees further delays?

EUV sees further delays?
by Robert Maire on 10-14-2015 at 12:00 pm

Headwinds which will likely continue into 2016…
ASML reported revenues of 1.55B Euros with EPS of 0.75 Euros more or less in line with expectations. Orders were the weak spot, falling to 904M Euros versus the previous Q2 orders of 1.523B Euros. The company guided Q4 revenues to be down about 10% to 1.4B Euros below current flattish… Read More


EUV – So late to the party it may already be over!

EUV – So late to the party it may already be over!
by Robert Maire on 09-29-2015 at 12:00 pm

Stocks in the semiconductor equipment space continue to fall only this time along with the broad market. We had recently pointed out that LRCX was the last to fall among the large cap companies in the space but now the question becomes when have they fallen enough to say its over, and which stocks have more to fall……

ASMLRead More


ASML ASyMptotic progress- When will we get to EUV?

ASML ASyMptotic progress- When will we get to EUV?
by Robert Maire on 02-24-2015 at 5:30 pm

  • ASML making progress – but is it fast enough?
  • ASML has missed 10nm , can it catch 7nm? An economic question
  • Day one at SPIE- Better tone than last year but still cautious

1000 simulated wafers versus 700 simulated
At the opening of the SPIE conference ASML announced that TSMC had reached 1000 wafers a day “exposed”
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EUV Will Never Happen

EUV Will Never Happen
by Paul McLellan on 05-23-2014 at 9:21 pm

ASML SMIC TSMC EUV DUV

I had lunch today with a guy who has to remain nameless. But he is on the edge of the semiconductor lithography thing. He told me EUV will never happen. Of course lots of people have said that. Me for one. But he said everyone knows it. The investment community, the foundries, everyone. Intel put money into ASML in the hopes that it would… Read More


Extreme Ultra Violet (EUV)

Extreme Ultra Violet (EUV)
by Paul McLellan on 07-15-2012 at 8:15 pm

EUV is the great hope for avoiding having to go to triple (and more) patterning if we have to stick with 193nm light. There were several presentations at Semicon about the status of EUV. Here I’ll discuss the issues with EUV lithography and in a separate post discuss the issues about making masks for EUV.

It is probably worth … Read More