IEDM Opens with a Big Picture Keynote from TSMC’s Yuh-Jier Mii

IEDM Opens with a Big Picture Keynote from TSMC’s Yuh-Jier Mii
by Mike Gianfagna on 12-12-2024 at 10:00 am

IEDM Opens with a Big Picture Keynote from TSMC’s Yuh Jier Mii

The main program for the 70th IEDM opened on Monday morning in San Francisco with an excellent keynote from Dr. Yuh-Jier Mii, Executive Vice President and Co-Chief Operating Officer at TSMC. Dr. Mii joined TSMC in 1994. Since then, he has contributed to the development and manufacturing of advanced CMOS technologies in both fab operations and R&D. In 2022, he received the IEEE Frederik Philips Award recognizing his outstanding accomplishments in the management of research and development. He holds 34 patents globally, including 25 US patents, and holds a B.S. in electrical engineering from National Taiwan University, as well as an M.S. and Ph.D. in Electrical Engineering from the University of California, Los Angeles (UCLA). He treated the audience to a broad view of technology innovation in his keynote. Let’s look at how IEDM opens with a big picture keynote from TSMC’s Yuh-Jier Mii.

About IEDM

To begin, that wasn’t a typo above. The 70th annual IEEE International Electron Devices Meeting (IEDM) just concluded. This incredibly long-lived conference began tracking technology innovation in the vacuum tube era. For seven decades the event has tracked semiconductor and electronic device technology, design, manufacturing, physics, and modeling. This year’s event had a record high number of submissions at 763 and a record number of accepted papers at 274. 

The figure below summarizes the growth of this premier conference over the years.

2024 IEDM paper statistics

About the Keynote

Dr. Yuh-Jier Mii

Dr. Mii began his keynote with a short but compelling video that provided an overview of some of the innovations that have occurred in the semiconductor industry in general, and some of the advances contributed by TSMC in particular. All of this is driving the development of a trillion-transistor system in the near future. These trends are summarized in the graphic at the top of this post.

Dr. Mii touched on five key areas in his talk. I will provide a summary of his remarks. He began with a semiconductor industry & market outlook (I). AI is poised to play a key role in the industry’s growth as we move toward one trillion dollars in revenue by 2030. He projected that high-performance computing will contribute 40% of this number, mobile 30%, automotive 15%, and IoT 10%. He discussed the how ubiquitous AI technology is becoming across many products and markets. Generative AI and large language models are contributing to this growth and the complexity of the models for these new applications and the associated training required present substantial new challenges.

He pointed out that these new applications will require gigawatts of power within a few years. Reducing power consumption will be critical to allow these applications to flourish and new device technology and architectural advances will be needed.

Next, Dr. Mii discussed advanced logic technologies (II). He described the industry’s move from planar devices to FinFETs and most recently nanosheet technology for gate-all-around devices at 2nm. Patterning also advanced from immersion lithography to EUV and multi-patterning EUV. Design technology co-optimization, or DTCO has also helped to bring technology to new levels. For example, backside power delivery has helped to reduce power and increase density.

Regarding logic technology frontiers (III), Dr. Mii discussed the evolution from FinFET to nanosheet FET to vertically stacked complimentary or CFET architectures. He explained that the CFET approach holds great promise to allow continued Moore’s Law scaling with its 1.5 – 2X density improvement when compared to nanosheet devices. He described the work going on at TSMC to make CFETs a reality. At this year’s IEDM, TSMC is presenting the first and smallest CFET inverter at a 48nm pitch.

Dr. Mii explained that beyond CFET, the ongoing quest for higher performance and more energy-efficient logic technologies necessitates an accelerated search for channel materials that go beyond those based on silicon. He explained that carbon nanotubes (CNTs) and transition metal dichalcogenides (TMDs) have garnered significant interest due to both their physical and electronic properties. In the area of interconnects, he discussed a new 2D material that is being explored as a superior alternative to copper. This material shows lower thin film resistivity than copper at reduced thicknesses, helping to mitigate line resistance increases in scaled geometries and enhance overall performance.

Dr. Mii then moved to a discussion of system integration technologies (IV). While pushing 2D technology scaling to enable better transistors and higher packing density in monolithically integrated SoCs is important, so are innovations beyond the chip level to extend integration into the heterogenous domain.

He explained that advanced silicon stacking and packaging technologies, including SoIC, InFO, and CoWoS® continue to aggressively scale down the chip-to-chip interconnect pitch, offering the potential to improve 3D interconnect density by another six orders of magnitude. These trends are summarized in the figure below.

Advanced silicon stacking and packaging technologies

Dr. Mii discussed an emerging System-on-Wafer (SoW) technology, where all the chiplets and HBM memories for an entire system can be integrated directly on a 12-inch wafer. He explained that this approach can deliver an additional 40X compute improvement when compared to the most advanced data center AI accelerator today. Optical interconnect was also discussed, which can provide 20X more power efficiency than copper interconnect. Vertical stacking of logic and optical transceivers will help deliver these improvements. He explained that today the laser light source is outside the chip, but efforts are underway to integrate the laser on chip as well.

Dr. Mii concluded with a discussion of specialty technologies (V). Many of the items discussed here are high frequency or analog in nature to accommodate the interface between the digital and analog (real) world. He discussed innovations spanning N16 to N4 to accommodate the increased demands of new standards for WiFi.

Advances in embedded non-volatile RAM were also discussed in this part of the keynote. The benefits and challenges of both MRAM and RRAM were covered. CMOS image sensors were also discussed. This is a critical technology for automotive applications. As pixel size decreases, new approaches are needed to maintain sensitivity and dynamic range. Dr. Mii described work to separate the photo diode from the pixel device and re-integrate them using 3D wafer-to-wafer stacking.

Summary

Dr. Mii concluded by observing that semiconductor innovations, encompassing advances in device technology, system-level scaling, and customer-specific design ecosystems will remain pivotal in driving rapid technological progress in the era of AI. He pointed out that TSMC is actively exploring a new array of innovations for future generations of technology, system integration platforms, and design ecosystems. These efforts will be crucial in meeting the increasing societal demands for energy-efficient, data-intensive computing in the coming decades. He invited the audience to join in this important collaboration. And that’s how IEDM opens with a big picture keynote from TSMC’s Yuh-Jier Mii.

Also Read:

Analog Bits Builds a Road to the Future at TSMC OIP

Maximizing 3DIC Design Productivity with 3DBlox: A Look at TSMC’s Progress and Innovations in 2024

Synopsys and TSMC Pave the Path for Trillion-Transistor AI and Multi-Die Chip Design


Analog Bits Builds a Road to the Future at TSMC OIP

Analog Bits Builds a Road to the Future at TSMC OIP
by Mike Gianfagna on 10-21-2024 at 6:00 am

Analog Bits Builds a Road to the Future at TSMC OIP

The TSMC Open Innovation Platform (OIP) Ecosystem Forum has become the industry benchmark when it comes to showcasing industry-wide collaboration. The extreme design, integration and packaging demands presented by multi-die, chiplet-based design have raised the bar in terms of required collaboration across the entire supply chain. World-class development and collaboration were on display at the recent event, which was held in Santa Clara on September 25, 2024. A critical technology required for success is enabling IP, in particular for sensing and power management.  Analog Bits showcased substantial capabilities here. Let’s examine some of the work presented to see how Analog Bits builds a road to the future at TSMC OIP.

IP Development Progress

Analog Bits discussed some of the unique challenges advanced chip and multi-die design presents. Multi-domain sensing was discussed, along with the additional challenge of non-uniform thermal distributions. Real-time monitoring is another requirement. If the face of all this, calibration complexity, voltage supply noise, and crosstalk must all be dealt with as well.

Analog Bits portfolio of on-die sensing IP was presented, including:

  • PVT Sensors – integrated and pinless
  • Power on reset and over current detection macros
  • Power supply detectors that include:
    • Fast detecting glitch
    • Synchronized droop detection with filtering and differential sensing

The benefits of a comprehensive on-die sensing IP portfolio were also discussed. At the top of the list is improved power efficiency. A good approach here also prevents overheating and minimizes thermal stress. The overall benefits of enhanced reliability and improved yield also come into play.

Power management is also a key benefit. Things like voltage scalability, voltage spike, and droop protection are examples. Better integration that results in space savings is an added benefit.

Analog Bits presented a significant amount of silicon data based on a TSMC N3P test chip. The graphic at the stop of this post is an overview of what’s on this chip. There were many impressive results to show. Here is a list of some of them:

  • Temperature linearity and precision for the High-Accuracy Thermometer
  • Linearity and precision for the high-accuracy Voltage Sensor
  • Measured trigger voltage vs. threshold and untrimmed threshold accuracy for the Droop Detector
  • An overview of Low-Dropout (LDO) regulator development

Regarding the LDO, here is a summary of the program:

  • First LDO modules proven in silicon
  • Latest N3 test-chip taped out Q2 2024
  • Packaging and initial bring up Q1 2025
  • Automotive planned for mid-2025

Here is an example of the data presented. The plot is showing Voltage Sensor accuracy with the following parameters: VDDA: 1.2V, VDD: 0.75V, Corner: TT.

Voltage Sensor Accuracy

IP Collaboration Progress

OIP is all about ecosystem collaboration, so Analog Bits teamed with Arm to present an impressive presentation entitled, Optimized Power Management of Arm CPU Cores with Integrated Analog Bits Power Management and Clocking IP’s. The presenters were Lisa Minwell, Director of Technology Management at Arm and Alan Rogers, President at Analog Bits.

The once-in-a-generation transformation occurring in digital infrastructure was discussed. Complexity increases in data center SoC’s, coupled with AI deployment has made energy efficiency a central issue. It was pointed out that advanced chip and chiplet-based designs in 3nm and 2nm are integrating many Arm Neoverse cores.

The need for managing power to these cores on a granular level is getting increasingly important. The traditional methods of using off-chip LDO and power sensors no longer scales.  A new approach is needed.

The work Analog Bits and Arm have done on several integrated power management and clocking IPs was presented. Arm customers can readily use these solutions in N3P and soon in N2P. LDO regulator IPs were also discussed to efficiently manage the large absolute and dynamic current supplies to Arm CPU cores.

A case study of how CPU cores seamlessly integrate with Analog Bits LDO and Power Glitch Detector IPs, along with integrated clocking capabilities was also presented.  The implications of this work is substantial for advanced data center applications.

To Learn More

I have presented some of the highlights of Analog Bits presence at TSMC OIP. There is a lot more to the story, and you find out more about Analog Bits industry impact on SemiWiki here. You can also check out the company’s website here. And that’s how Analog Bits builds a road to the future at TSMC OIP.

 


Maximizing 3DIC Design Productivity with 3DBlox: A Look at TSMC’s Progress and Innovations in 2024

Maximizing 3DIC Design Productivity with 3DBlox: A Look at TSMC’s Progress and Innovations in 2024
by Kalar Rajendiran on 10-08-2024 at 10:00 am

3DFabric Silicon Validated Thermal Analysis

At the 2024 TSMC OIP Ecosystem Forum, one of the technical talks by TSMC focused on maximizing 3DIC design productivity and rightfully so. With rapid advancements in semiconductor technology, 3DICs have become the next frontier in improving chip performance, energy efficiency, and density. TSMC’s focus on streamlining the design process for these cutting-edge solutions has been critical, and 3DBlox is central to this mission. 3DBlox is an innovative framework inclusive of a standardized design language, introduced by TSMC aimed at addressing the complexities of 3D integrated circuit (3DIC) design.  The following is a synthesis of that talk, delivered by Jim Chang, Deputy Director at TSMC for the 3DIC Methodology Group.

Progress from 2022 to 2023: Laying the Foundations for 3DBlox

In 2022, TSMC began exploring how to represent their 3DFabric offerings, particularly CoWoS (Chip-on-Wafer-on-Substrate) and INFO (Integrated Fan-Out), which are critical technologies for 3DIC. CoWoS integrates chips using a silicon interposer, while INFO uses RDL (Redistribution Layer) interposers. TSMC combined these approaches to create CoWoS-R, replacing the silicon interposer with RDL technology, and CoWoS-L, which integrates local silicon interconnects.

With these building blocks in place, TSMC realized that they needed a systematic way to represent their increasingly complex technology offerings. This led to the creation of 3DBlox, which provided a standard structure for representing all possible configurations of TSMC’s 3DFabric technologies. By focusing on three key elements—chiplets, chiplet interfaces, and the connections among interfaces—TSMC was able to efficiently model a wide range of 3DIC configurations.

By 2023, TSMC had honed in on chiplet reuse and design feasibility, introducing a top-down methodology for early design exploration. This methodology allowed TSMC and its customers to conduct early electrical and thermal analysis, even before having all the design details. Through a system that allowed for chiplets to be mirrored, rotated, or flipped while maintaining a master list of chiplet information, TSMC developed a streamlined approach for design rule checking across multiple chiplets.

Innovations in 2024: Conquering Complexity with 3DBlox

By 2024, TSMC faced the growing complexity of 3DIC systems and devised new strategies to address it. The key innovation was breaking down the 3D design challenge into more manageable 2D problems, focusing on the Bus, TSVs (Through-Silicon Vias), and PG (Power/Ground) structures. These elements, once positioned during the 3D floorplanning stage, were transformed into two-dimensional issues, leveraging established 2D design solutions to simplify the overall process.

Key Technology Developments in 2024

TSMC’s focus on maximizing 3DIC design productivity in 2024 revolved around five major areas of development: design planning, implementation, analysis, physical verification, and substrate routing.

Design Planning: Managing Electrical and Physical Constraints

In 3DIC systems, placing the Bus, TSVs, and PG structures requires careful attention to both electrical and physical constraints, especially Electromigration and IR (EMIR) constraints. Power delivery across dies must be precise, with the PG structure sustaining the necessary power while conserving physical resources for other design elements.

One of TSMC’s key innovations was converting individual TSV entities into density values, allowing them to be modeled numerically. By using AI-driven engines like Cadence Cerebrus Intelligent Chip Explorer and Synopsys DSO.ai, TSMC was able to explore the solution space and backward-map the best solutions for bus, TSV, and PG structures. This method allowed designers to choose the best tradeoffs for their specific designs.

Additionally, chip-package co-design was emphasized in 2024. TSMC collaborated with key customers to address the challenges of coordinating between the chip and package teams, which previously operated independently. By utilizing 3DBlox’s common object format and common constraints, teams could collaborate more efficiently, settling design constraints earlier in the process, even before Tech files were available.

 Implementation: Enhancing Reuse and Hierarchical Design

As customers pushed for increased chiplet reuse, TSMC developed hierarchical solutions within the 3DBlox language to support growing 3DIC designs. With the increasing number of alignment marks required to align multiple chiplets, TSMC worked closely with EDA partners to identify the four primary types of alignment markers and automate their insertion in the place-and-route flow.

Analysis: Addressing Multi-Physics Interactions

Multi-physics interactions, particularly related to thermal issues, have become more prominent in 3DIC design. TSMC recognized that thermal issues are more pronounced in 3DIC than in traditional 2D designs due to stronger coupling effects between different physical engines. To address this, TSMC developed a common database that allows different engines to interact and converge based on pre-defined criteria, enabling efficient exploration of the design space.

One of the critical analysis tools introduced in 2024 was warpage analysis, crucial as the size of 3DIC fabric grows. TSMC developed the Mech Tech file, defining the necessary information for industry partners to facilitate stress simulation, addressing a gap in warpage solutions within the semiconductor industry.

Physical Verification: Ensuring Integrity in 3DIC Designs

TSMC tackled the antenna effect, a manufacturing issue where metal may accumulate plasma charges that can penetrate gate oxides via TSVs and bumps. By collaborating with EDA partners, TSMC created a design rule checking (DRC) deck that models and captures the antenna effect, ensuring it can be accounted for during the design process.

In 2024, TSMC also introduced enhancements in layout vs. schematic (LVS) verification for 3DIC systems. Previously, LVS decks assumed a one-top-die, one-bottom-die configuration. However, 3DBlox’s new automated generation tools allow for any configuration to be accurately verified, supporting more complex multi-die designs.

Substrate Routing: Tackling the Growing Complexity

As 3DIC integration grows in scale, so does the complexity of substrate routing. Substrate design has traditionally been a manual process. The growing size of substrates, combined with the intricate requirements of modern 3DIC designs, necessitated new innovations in this space.

TSMC’s work on Interposer Substrate Tech file formats began three years ago, and by 2024, they were able to model highly complex structures, such as the inclusion of tear drops in the model. This advancement offers a more accurate and detailed representation of substrates, crucial for the larger and more intricate designs emerging in the 3DIC space. TSMC worked with their OSAT partners through the 3DFabric Alliance to support this format.

Summary: 3DBlox – Paving the Way for 3DIC Innovation

TSMC’s 3DBlox framework has proven to be a crucial step in managing the complexity and scale of 3DIC design. From early exploration and design feasibility in 2023 to breakthroughs in 2024 across design planning, implementation, analysis, physical verification, and substrate routing, TSMC’s innovations are paving the way for more efficient and scalable 3DIC solutions. As the industry moves toward even more advanced 3D integration, the 3DBlox committee announced plans to make the 3DBlox standard publicly available through IEEE. 3DBlox will continue to play a vital role in enabling designers to meet the increasing demands of semiconductor technology for years to come.

Also Read:

Synopsys and TSMC Pave the Path for Trillion-Transistor AI and Multi-Die Chip Design

TSMC 16th OIP Ecosystem Forum First Thoughts

TSMC OIP Ecosystem Forum Preview 2024


Synopsys and TSMC Pave the Path for Trillion-Transistor AI and Multi-Die Chip Design

Synopsys and TSMC Pave the Path for Trillion-Transistor AI and Multi-Die Chip Design
by Kalar Rajendiran on 10-02-2024 at 10:00 am

OIP 2024 Synopsys TSMC

Synopsys made significant announcements during the recent TSMC OIP Ecosystem Forum, showcasing a range of cutting-edge solutions designed to address the growing complexities in semiconductor design. With a strong emphasis on enabling next-generation chip architectures, Synopsys introduced both new technologies and key updates to existing solutions in collaboration with TSMC.

At the heart of this collaboration is the goal of accelerating the development of trillion-transistor chips, which are necessary to support the computational demands of Artificial Intelligence (AI) and high-performance computing (HPC) applications. As these systems continue to grow in complexity, Synopsys and TSMC are collaborating to leverage AI to streamline the design process and ensure power efficiency, scalability, and system reliability. What caught my interest and attention was the focus multi-die, 3D Integrated Circuits (3DICs), and multi-physics design analysis are receiving in this collaboration. Before we dive into that, below is a roundup of the key announcements.

Roundup of the Key Announcements from Synopsys

Synopsys aims to enable the design of more complex, efficient, and scalable multi-die packages that can meet the evolving demands of AI, HPC, and other advanced computing applications.

Synopsys.ai Suite Optimized for TSMC N2 Process Technology: This was a key update, as Synopsys’ AI-driven EDA suite was already known for its ability to improve Quality of Results (QoR). The latest optimization focuses on the N2 process, helping designers move more swiftly to next-generation nodes while enhancing chip performance and power efficiency.

Backside Power Delivery in TSMC A16 Process: A new innovation that stood out was the backside power delivery system, which promises more efficient power routing and reduced energy consumption. This method helps manage the demands of trillion-transistor architectures by optimizing signal integrity and chip density.

Synopsys IP Solutions for 3DFabric Technologies: Updates were made to Synopsys’ UCIe and HBM4 IP solutions, which are crucial for TSMC’s 3DFabric technologies, including CoWoS (Chip on Wafer on Substrate) and SoIC (System on Integrated Chips). These updates further improve bandwidth and energy efficiency in multi-die designs.

3DIC Compiler, 3DSO.ai and Multi-Physics Flow: One of the more notable announcements involved the enhancement of Synopsys’ 3DIC Compiler platform and 3DSO.ai to address the complexities of multi-die designs and offer AI-driven multi-physics analysis during the design process, helping to streamline system-level integration.

TSMC Cloud Certification for Accelerated Design: To further accelerate the design process, Synopsys and TSMC have also enabled Synopsys EDA tools on the cloud, certified through TSMC’s Cloud Certification. This provides mutual customers with cloud-ready EDA tools that not only deliver accurate QoR but also seamlessly integrate with TSMC’s advanced process technologies.

The Importance of Multi-Die, 3DIC, and Multi-Physics Design

As semiconductor technology pushes beyond the traditional limits of Moore’s Law, multi-die designs and 3DICs have become essential for enhancing performance and density. These technologies allow for multiple dies, each with its own specialized function, to be stacked or placed side-by-side within a single package. However, the integration of these dies—especially when combining electronic ICs with photonic ICs—introduces significant design challenges.

One of the most pressing issues in multi-die design is thermal management. As multiple heat-generating dies are placed in close proximity, the risk of overheating increases, which can degrade performance and shorten the lifespan of the chip. Additionally, electromagnetic interference (EMI), signal integrity, and power distribution present further challenges that designers must account for during early-stage development.

This is where multi-physics analysis plays a critical role. Multi-physics analysis is the process of evaluating how different physical phenomena—such as heat dissipation, mechanical stress, and electrical signals—interact with one another within a chip package. Without an understanding of these interactions, it becomes nearly impossible to design reliable and efficient multi-die systems.

Synopsys Solutions for Multi-Die and 3DIC Challenges

Synopsys is at the forefront of addressing these challenges through its AI-powered solutions, many of which were updated or introduced during the TSMC OIP Ecosystem Forum. These tools are specifically designed to address the complexity of multi-die designs and 3DICs, where early-stage analysis and optimization are crucial for success.

AI-Driven EDA with Synopsys.ai

One of the most significant updates came from Synopsys.ai, which is now optimized for TSMC’s N2 process technology. This suite allows designers to leverage AI to improve design efficiency and reduce the time needed to move designs to production. By incorporating AI into the design process, Synopsys.ai helps engineers navigate the vast array of potential design configurations, ensuring that the most optimal solutions are chosen for performance, power efficiency, and thermal management.

“Synopsys’ certified Custom Compiler and PrimeSim solutions provide the performance and productivity gains that enable our designers to meet the silicon demands of high-performance analog design on the TSMC N2 process,” said Ching San Wu, Corporate VP at MediaTek in Synopsys’ news release. “Expanding our collaboration with Synopsys makes it possible for us to leverage the full potential of their AI-driven flow to accelerate our design migration and optimization efforts, improving the process required for delivering our industry-leading SoCs to multiple verticals.”

3DIC Compiler and 3DSO.ai for Multi-Die Systems

These tools enable designers to conduct multi-physics analysis early in the design process, which is essential for optimizing thermal and power management, signal integrity, and mechanical stability in multi-die systems. By identifying potential issues—such as hotspots or signal degradation—early in the process, designers can make informed adjustments before reaching the later stages of development, thus avoiding costly redesigns.

3DSO.ai leverages AI to analyze complex multi-die configurations, allowing engineers to test a wide range of potential scenarios in a fraction of the time it would take using traditional methods. This capability is critical as designs become more complex, with tens of thousands of possible combinations for how dies are stacked, interconnected, and cooled.

TSMC-certified Synopsys 3DIC Compiler’s compatibility with TSMC’s SoIC and CoWoS technologies further solidify its position as a leading platform for multi-die designs. This ensures seamless collaboration across design architecture and planning, design implementation, and signoff teams, enabling efficient 3DIC development for cutting-edge applications.

These technologies are critical for enabling the heterogeneous integration of dies in 3DIC systems, which helps overcome traditional scaling challenges such as thermal management and signal integrity.

As a demonstration vehicle, Synopsys achieved a successful tapeout recently, of a test chip featuring a multi-die design using TSMC’s CoWoS advanced packaging technology. This test chip leveraged TSMC’s 3DFabric technology and Synopsys’ multi-die solutions, including silicon-proven UCIe IP, 3DIC Compiler unified exploration-to-signoff platform, and the 3DSO.ai AI-driven optimization solution. The Figure below showcases the level of system analysis and optimization enabled by Synopsys 3DSO.ai. The test chip demonstrated unmatched performance reliability.

Figure: Synopsys 3DSO.ai AI-enabled system analysis and optimization 

Optimizing Power Delivery with Backside Power Innovations

The new backside power delivery capability, introduced through TSMC’s A16 process, represents a critical leap forward in ensuring power integrity in multi-die systems. By routing power through the backside of the chip, more space is made available on the front for signal routing and transistor placement. This helps reduce energy consumption while also enhancing signal integrity, ensuring that trillion-transistor designs can operate efficiently and reliably.

Summary

The announcements made by Synopsys at the TSMC OIP Ecosystem Forum underscore the growing importance of multi-die architectures, 3DIC systems, and multi-physics analysis in semiconductor design. With new AI-driven tools and key updates to existing solutions, Synopsys is helping engineers overcome the complex challenges posed by trillion-transistor designs and multi-die integration.

By leveraging Synopsys’ advanced EDA tools, platforms and IP, engineers can now address critical issues—like thermal management, signal integrity, and power distribution—at the earliest stages of the design process. This proactive approach not only improves design efficiency but also ensures that the final product meets the stringent performance requirements of AI, HPC, and other next-generation applications.

You can read the Synopsys announcement in its entirety here, and more details on the test chip tapeout here.

Also Read:

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The Immensity of Software Development and the Challenges of Debugging Series (Part 2 of 4)

Synopsys Powers World’s Fastest UCIe-Based Multi-Die Designs with New IP Operating at 40 Gbps


TSMC 16th OIP Ecosystem Forum First Thoughts

TSMC 16th OIP Ecosystem Forum First Thoughts
by Daniel Nenni on 09-26-2024 at 6:00 am

TSMC Advanced Technology Roadmap 2024

Even though this is the 16th OIP event please remember that TSMC has been working closely with EDA and IP companies for 20+ years with reference flows and other design enablement and silicon verification activities. The father of OIP officially is Dr. Morris Chang who named it the Grand Alliance. However, Dr. Cliff Hou is the one who actually created the OIP which is now the largest and strongest ecosystem in the history of semiconductors.

I spent a good portion of my career working with EDA and IP companies on foundry partnerships as well as foundries as a customer strategist. In fact, I still do and it is one of the most rewarding experiences of my career. Hsinchu was my second home for many years and the hospitality of the Taiwan people is unmatched. That same hospitality is a big part of the TSMC culture and part of the reason why they are the most trusted technology and capacity provider.

Bottom line: If anyone thinks this 20+ years of customer centric collaboration can be replicated or reproduced, it cannot, the OIP is a moving target, it expands and gets stronger every year. An ecosystem is also driven by the success of the company and in no part of history has TSMC been MORE successful than today, my opinion.

We will be covering the event in more detail next week but I wanted to share my first thoughts starting with a quote from a blog published yesterday by Dan Kochpatcharin, Head of Ecosystem and Alliance Management Division at TSMC. I met Dan 20 years ago when he was at Chartered Semiconductor. For the last 17 years he has been at TSMC where he started as Deputy Director of the TSMC IP Alliance (working for Cliff Hou) which is now a big part of the TSMC OIP.

Advancing 3D IC Design for AI Innovation by Dan Kochpatcharin

“Our collaboration with TSMC on advanced silicon solutions for our AWS-designed Nitro, Graviton, Trainium, and Inferentia chips enables us to push the boundaries of advanced process and packaging technologies, providing our customers with the best price performance for virtually any workload running on AWS.” – Gary Szilagyi, vice president, Annapurna Labs at AWS

Readers of the SemiWiki Forum will get this inside joke and if you think this quote from AWS is a coincidence you are wrong. C.C. Wei has a very competitive sense of humor!

Dr. L.C. Lu (Vice President of Research & Development / Design & Technology Platform) did the keynote which was quite good. I first met L.C. when he was in charge of the internal TSMC IP group working for Cliff Hou. He is a very smart no nonsense guy who is also a great leader. Coincidentally, L.C. and CC Wei both have P.h.D.s from Yale.

Some of the slides were very similar to the earlier TSMC Symposium slides which tells you that TSMC means what it says and says what it means. There were no schedule changes, it was all about implementation, implementation, and implementation.

L.C. did an interesting update on Design-Technology Co-Optimization (DTCO). I first heard of DTCO in 2022 and it really is the combination of design and process optimization. I do know customers who are using it but this is the first time I have seen actual silicon results. Remember, this is two years in the making for N3 FinFlex.

The numbers L.C. shared were impressive. In order to do real DTCO a foundry has to have both strong customer and EDA support and TSMC has the strongest. For energy efficiency (power savings) N3 customers are seeing 8%-20% power reductions and 6%-38% improvement in logic density depending on the fin configuration.

L.C. also shared DTCO numbers for N2 NanoFlex and the coming A16 SPR (Super Power Rail) which were all in the double digits (11%-30%). I do know quite a few customers who are designing to N2, in fact, it is just about all of TSMC’s N3 customers I am told. It will be interesting to see more customer numbers next year.

L.C. talked about packaging as well which we will cover in another blog but let me tell you this: By the end of 2024 CoWos will have more than 150 tape-outs from more than 25 different companies! And last I heard TSMC CoWos capacity will more than quadruple from 2023 levels by the end of 2026. Packaging is one of the reasons why I feel that the semiconductor industry has never been more exciting than it is today, absolutely!

Also Read:

TSMC OIP Ecosystem Forum Preview 2024

TSMC 16th OIP Ecosystem Forum First Thoughts

TSMC’s Business Update and Launch of a New Strategy


TSMC OIP Ecosystem Forum Preview 2024

TSMC OIP Ecosystem Forum Preview 2024
by Daniel Nenni on 09-19-2024 at 10:00 am

TSMC OIP 2024

The 2024 live conferences have been well attended thus far and there are many more to come. The next big event in Silicon Valley is the TSMC Global OIP Ecosystem Forum on September 25th at the Santa Clara Convention Center. I expect a big crowd filled with both customers and partners.

This is the 16th year of OIP and it has been an honor to be a part of it. The importance of semiconductor ecosystems is greatly understated as is the importance of the TSMC OIP Ecosystem.

The big change I have seen over the last few years is momentum. The FinFET era has gained an incredible amount of ecosystem strength and the foundation of course is TSMC. When we hit 5nm the tide changed in TSMC’s favor with a huge amount of TSMC N5 EDA, IP, and ASIC services support. In fact, there were a record setting number of tape-outs on this node. This momentum has increased at 3nm with TSMC N3 (the final FinFET node) having the strongest ecosystem support and tape-outs in the history of the fabless ecosystem in my experience.

The momentum is continuing with N2 which will be the first GAA node for TSMC. Rumor has it N2 will have comparable tape-outs with N3. It is too soon to say what will happen with the angstrom era but my guess is that semiconductor innovation and Moore’s Law will continue in one form or another.

A final thought on the ecosystem, while it appears that IDM foundries have more R&D strength than pure-play foundries I can assure you that is not the case. The TSMC OIP Ecosystem, for example, includes the largest catalog of silicon verified IP in the history of the semiconductor industry. IP companies first develop IP in partnership with TSMC to leverage the massive TSMC customer base. In comparison, the IDM foundries pay millions of dollars to port select IP to each of their processes to encourage customer demand.

Throughout the FinFET era foundries, customers and partners have spent hundreds of billions of R&D dollars in support of the fabless semiconductor ecosystem which will get the semiconductor industry to the one trillion dollar mark by the end of this decade, absolutely.

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Application-Specific Lithography: Patterning 5nm 5.5-Track Metal by DUV

Application-Specific Lithography: Patterning 5nm 5.5-Track Metal by DUV
by Fred Chen on 08-08-2024 at 6:00 am

Application Specific Lithography I

At IEDM 2019, TSMC revealed two versions of 5nm standard cell layouts: a 5.5-track DUV-patterned version and a 6-track EUV-patterned version [1]. Although the metal pitches were not explicitly stated, later analyses of a 5nm product, namely, Apple’s A15 Bionic chip, revealed a cell height of 210 nm [2]. For the 6-track cell, this indicates a metal track pitch of 35 nm, while for the 5.5-track cell, the pitch is 38 nm (Figure 1). Just a 3 nm difference in pitch matters a lot for the patterning approach. As will be shown below, choosing the 5.5-track cell for DUV patterning makes a lot of sense.

Figure 1. 210 nm cell height means 38 nm track pitch for 5.5 tracks (left) or 35 nm track pitch for 6 tracks (left).

Extending the 7nm DUV Approach to 5nm

The 5.5-track metal pitch of 38 nm is at the limit of DUV double patterning. It can therefore reuse the same approach used in 7nm, where the 6-track cell metal pitch was 40 nm [3]. This can be as simple as self-aligned double patterning followed by two self-aligned cut blocks, one for each material to be etched (core or gap) (Figure 2). The minimum pitch of the cut blocks (for each material) is 76 nm, allowing a single exposure.

Figure 2. SADP followed by two self-aligned cut blocks (one for the core material, one for the gap material). Process sequence from left to right: (i) SADP (core lithography followed by spacer deposition and etchback, and gapfill; (ii) cut block lithography for exposing gap material to be etched; (iii) refill of cut block for gap material; (iv) cut block lithography for exposing core material to be etched; (v) refill of cut block for core material. Self-aligned vias (not shown) may be partially etched after the block formation [4].

In lieu of SADP, SALELE [5] may be used instead. This would add an extra mask for the gap material, resulting in a total of four mask exposures needed.

Going Below 38 nm Pitch: Hitting the Multipatterning Barrier

For the 3nm node, it is expected that the metal track pitch will go below 30 nm [6]. Any pitch below 38 nm would entail the use of substantially more DUV multipatterning [7]. Yet a comparable amount of multipatterning could also be expected even for EUV, as the minimum pitch from photoelectron spread can be effectively 40-50 nm for a typical EUV resist [8,9]. The edge definition for a 25 nm half-pitch 60 mJ/cm2 exposure is heavily affected by both the photon shot noise and the photoelectron spread (Figure 3).

Figure 3. 25 nm half-pitch electron distribution image exposed with an incident EUV dose of 60 mJ/cm2 (13 mJ/cm2 absorbed), with a 7.5 nm Gaussian blur to represent the electron spread function given in ref. [9]. A 1 nm pixel is used, with 4 secondary electrons per photoelectron.

5nm For All?

The 5.5-track cell provides an easy migration path from 7nm to 5nm using DUV double patterning. Potentially, this is one of the easier ways for Chinese companies to catch up at 5nm, although clearly that would be as far as they can take it.

References

[1] G. Yeap et al., IEDM 2019, Figure 5.

[2] https://www.angstronomics.com/p/the-truth-of-tsmc-5nm

[3] https://fuse.wikichip.org/news/2408/tsmc-7nm-hd-and-hp-cells-2nd-gen-7nm-and-the-snapdragon-855-dtco/#google_vignette

[4] F. Chen, Self-Aligned Block Redistribution and Expansion for Improving Multipatterning Productivity, https://www.linkedin.com/pulse/self-aligned-block-redistribution-expansion-improving-frederick-chen-rgnwc/

[5] Y. Drissi et al., Proc. SPIE 10962, 109620V (2019).

[6] https://fuse.wikichip.org/news/7375/tsmc-n3-and-challenges-ahead/

[7] F. Chen, Extension of DUV Multipatterning Toward 3nm, https://semiwiki.com/lithography/336182-extension-of-duv-multipatterning-toward-3nm/, https://www.linkedin.com/pulse/extension-duv-multipatterning-toward-3nm-frederick-chen/

[8] F. Chen, Why NA is Not Relevant to Resolution in EUV Lithography, https://www.linkedin.com/pulse/why-na-relevant-resolution-euv-lithography-frederick-chen-ytnoc, https://semiwiki.com/lithography/344672-why-na-is-not-relevant-to-resolution-in-euv-lithography/

[9] T. Kozawa et al., JVST B 25, 2481 (2007).

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TSMC Foundry 2.0 and Intel IDM 2.0

TSMC Foundry 2.0 and Intel IDM 2.0
by Daniel Nenni on 07-22-2024 at 10:00 am

TSMC 2Q2024 Investor Call

When Intel entered the foundry business with IDM 2.0 I was impressed. Yes, Intel had tried the foundry business before but this time they changed the face of the company with IDM 2.0 and went “all-in” so to speak. The progress has been impressive and today I think Intel is well positioned to capture the NOT TSMC business by providing a trusted alternative to the TSMC leading edge business. The one trillion dollar questions is: Will Intel take business away from TSMC on a competitive basis? I certainly hope so, for the greater good of the semiconductor industry.

On the most recent TSMC investor call, which is the first call with C.C. Wei as Chairman and CEO, TSMC branded their foundry strategy as Foundry 2.0. It is not a change of strategy, it is a new branding based on what TMSC has been successfully doing for years now, adding additional products and services to keep customers engaged. 3D IC packaging is a clear example but certainly not the only one. The Foundry 2.0 brand is well earned and is clearly targeted at Intel IDM 2.0 which I think is funny and a great example of CC Wei’s sharp wit.

I thought for sure that Intel 18A would be the breakout foundry node for Intel but according to the TSMC investor call, that is not the case. TSMC N3 was a runaway hit with 100% of the major design wins. Even Intel used TSMC N3. I hadn’t seen anything like this since TSMC 28nm which was on allocation as a result of being the only viable 28nm HKMG node out of the gate. History repeated itself with N3 due to the delay of 3nm alternatives. This made the TSMC ecosystem the strongest I have ever witnessed with both the domination of N3 and TSMC’s rapidly expanding packaging success. I had originally thought that some customers would stick with N3 until the second generation of N2 appeared but I was wrong. On yesterday’s investor call:

CC Wei: We expect the number of the new tape-outs for 2-nanometer technologies in its first two years to be higher than both 3-nanometer and 5-nanometer in their first two years. N2 will deliver full load performance and power benefit, with 10 to 15 speed improvement at the same power, or 25% to 30% power improvement at the same speed, and more than 15% chip density increase as compared with the N3E.

CC had mentioned this before but I can now confirm this based on my hallway discussions inside the ecosystem at recent conferences: N2 designs are in progress and will start taping out towards the end of this year.

I really don’t think the TSMC ecosystem gets enough credit, especially after the overwhelming success of N3, but the N2 node is a force in itself:

CC Wei: N2 technology development is progressing well, with device performance and yield on track or ahead of plan. N2 is on track for volume production in 2025 with a ramp profile similar to N3. With our strategy of continuous enhancement, we also introduce N2P as an extension of our N2 family. N2P features a further 5% performance at the same power or 5% to 10% power benefit at the same speed on top of N2. N2P will support both smartphone and HPC applications, and volume production is scheduled for the second half of 2026. We also introduce A16 as our next nanosheet-based technology, featuring Super Power Rail, or SPR, as a separate offering.

And, of course, the TSMC freight train continues:

CC Wei: TSMC’s SPR is an innovative, best-in-class backside power delivery solution that is forcing the industry to incorporate another backside contact scheme to preserve gate density and device with flexibility. Compared with N2P, A16 provides a further 8% to 10% speed improvement at the same power, or 15% to 20% power improvement at the same speed, and additional 7% to 10% chip density gain. A16 is best suited for specific HPC products with complex signal routes and dense power delivery network. Volume production is scheduled for the second half of 2026. We believe N2, N2P, A16, and its derivative will further extend our technology leadership position and enable TSMC to capture the growth opportunities way into the future.

Congratulations to TSMC on their continued success, it is well deserved. I also congratulate the Intel Foundry team for making a difference and I hope the 14A foundry node will give the industry a trusted alternative to TSMC out of the starting gate.  In my opinion, had it not been for Intel and of course CC Wei’s leadership and response to Intel’s challenge, we as an industry would not be quickly approaching the one trillion dollar revenue mark. Say what you want about Nvidia, but as Jensen Huang openly admits, TSMC and the foundry business is the real hero of the semiconductor industry, absolutely.

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VLSI Technology Symposium – Intel describes i3 process, how does it measure up?

VLSI Technology Symposium – Intel describes i3 process, how does it measure up?
by Scotten Jones on 06-28-2024 at 6:00 am

Figure 1. Process Key Dimensions Comparison.

At the VLSI Technology Symposium this week Intel released details on their i3 process. Over the last four nodes Intel has had an interesting process progression. In 2019, 10nm finally entered production with both high performance and high-density standard cells. 10nm went through several iterations eventually resulting in i7, a high-performance cell only process. When we characterize process density, we always talk about the highest density logic standard cell, 10nm achieved just over 100 million transistors per millimeter squared density (MTx/mm2), i7 in in 2022 only achieved approximately 64 MTx/mm2 density because it only had high performance cells. i4 entered production in 2023 and is once again a high-performance cell only process and achieves approximately 130 MTx/mm2. Finally, i3 will enter production in 2024 on multiple Intel products providing both high performance and high-density cells. The high-density cells achieve approximately 148 MTx/mm2 transistor density.

The key dimensions for the processes are compared in figure 1.

Figure 1. Process Key Dimensions Comparison.

In figure 1 the values for 10nm and i7 are actual values measured by TechInsights on production parts, the i4 and i3 values are from the VLSI Technology papers on i4 [1], and i3 [2]. The cell height for i3 of 210nm is for high density cells, there is also a 240nm height high performance cell with the same density as the i4 process. 240nm height high performance cells are 3 fin devices the same at i4 and the 210nm high density cells are 2 fin devices with wide metal zero.

Figure 2 presents the density changes between the processes in graphics form.

From 32nm through 10nm Intel accelerated from  2.0x to 2.4x and then to 2.7x density improvements, but as is the case with other companies pushing the leading edge, i3 is a less than 2x density jump.

Figure 2. Intel Process Density Comparison.

Figure 3 is from the Intel presentation and presents more details on the i4 to i3 process shrink.

Figure 3. i4 to i3 Process Shrink.

The i3 process will offer multiple variants targeted at different applications.

  • i3 base process and i3-T with TSVs targeted at client, server and base die for chiplet applications.
  • i3-E offer native 1.2 volt I/O devices, deep N-wells, and long channel analog devices, and is targeted at chipsets and storage applications.
  • i3-PT targets high performance computing and AI with 9μm pitch TSVs and hybrid bonding.

Figure 4 summarizes the process variants.

Figure 4. i3 Process Variants.

i3 features:

  • Smaller M2 pitch than i4.
  • Better fin profile.
  • Utilizes dipoles to set threshold voltages, i4 does not use dipoles. Dipoles improve gate oxide reliability.
  • Offer 14, 18, and 21 metal layer options (counts include metal 0).
  • 4 threshold voltages, V:VT, LVT, SVT, HVT.
  • Contact optimization to provide less overlap capacitance.
  • More effective EUV usage, i4 was Intel’s first EUV process, i3 EUV processes are less complex.
  • Lower line resistance and capacitance than i4.
  • 5x lower leakage at the same drive current as i4.
  • Increased frequency and drive current with no hot carrier increase.
  • Interconnect delay is now approximately half of overall delay and the base process has better RC delay, the PT process is even better.
  • At the same power i3 HD cells provide 18% better performance than i4 HP cells.

Figure 5 presents the interconnect pitches for the 14, 18, and 21 metal options.

Figure 5. Interconnect Pitches.

Figure 6 illustrates the improvement in interconnect RC delay.

Figure 6. Interconnect RC Delay.

And finally, figure 7 illustrates the 18% performance improvement over i4.

Figure 7. Interconnect Delay Improvement.

During an analysts briefing session questions and answers session Intel disclosed the channels are all silicon, no silicon germanium channels. Also, i4 designs have been ported to i3 and they are seeing PPA improvements on the same designs.

i3 is currently in high volume manufacturing with multiple Intel products.

i3 clearly represents a significant improvement over i4.

Comparisons to competitors

i3 is a significant improvement over i4 but how does it compare to competitors?

TechInsights has analyzed density, performance, and cost of i3 versus Samsung and TSMC processes. That analysis is available in the TechInsights platform here (free registration required):

Conclusion

Intel’s i3 process is a significant step forward from Intel’s i4 process with better density and performance. Intel’s i3 process is a more competitive foundry process than previous generations. Cost is more in-line with other foundry processes, density is slightly lower than Samsung 3nm and much lower than TSMC 3nm, but it has the best performance of the “3nm” processes.

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TSMC Advanced Packaging Overcomes the Complexities of Multi-Die Design

TSMC Advanced Packaging Overcomes the Complexities of Multi-Die Design
by Mike Gianfagna on 06-10-2024 at 6:00 am

TSMC Advanced Packaging Overcomes the Complexities of Multi Die Design

The TSMC Technology Symposium provides a worldwide stage for TSMC to showcase its advanced technology impact and the extensive ecosystem that is part of the company’s vast reach. These events occur around the world and the schedule is winding down. TSMC covers many topics at its Technology Symposium, including industry-leading HPC, smartphone, IoT, and automotive platform solutions, 5nm, 4nm, 3nm, 2nm processes, ultra-low power, RF, embedded memory, power management, sensor technologies, and AI enablement. Capacity expansion and green manufacturing achievements were also discussed, along with TSMC’s Open Innovation Platform® ecosystem. These represent significant achievements for sure. For this post, I’d like to focus on another set of significant achievements in advanced packaging. This work has substantial implications for the future of the semiconductor industry. Let’s examine how TSMC advanced packaging overcomes the complexities of multi-die design.

Why Advanced Packaging is Important

Advanced packaging is a relatively new addition to the pure-play foundry model. It wasn’t all that long ago that packaging was a not-so-glamorous finishing requirement for a chip design that was outsourced to third parties. The design work was done by package engineers who got the final design thrown over the wall to fit into one of the standard package configurations. Today, package engineers are the rock stars of the design team. These folks are involved at the very beginning of the design and apply exotic materials and analysis tools to the project. The project isn’t real until the package engineer signs off that the design can indeed be assembled.

With this part of the design process becoming so critically important (and difficult) it’s no surprise that TSMC and other foundries stepped up to the challenge and made it part of the overall set of services provided. The driver for all this change can be traced back to three words: exponential complexity increase. For many years, exponential complexity increase was delivered by Moore’s Law in the form of larger and larger monolithic chips. Today, it takes more effort and cost to get to the next process node and when you finally get there the improvement isn’t as dramatic as it once was. On top of that, the size of new designs is so huge that it can’t fit on a single chip.

These trends have catalyzed a new era of exponential complexity increase, one that relies on heterogeneous integration of multiple dies (or chiplets) in a single package, and that has created the incredible focus and importance of advanced packaging as critical enabling technology. TSMC summarizes these trends nicely in the diagram below.

TSMC’s Advanced Packaging Technologies

TSMC presented many parts of its strategy to support advanced packaging and open the new era of heterogenous integration. These are the technology building blocks for TSMC’s 3DFabric™ Technology Portfolio:

  • CoWoS®: Chip-on-Wafer-on-Substrate is a 2.5D wafer-level multi-chip packaging technology that incorporates multiple dies side-by-side on a silicon interposer to achieve better interconnect density and performance. Individual chips are bonded through micro-bumps on a silicon interposer forming a chip-on-wafer (CoW).
  • InFO: Integrated Fan-Out wafer level packaging is a wafer level system integration technology platform, featuring high density RDL (Re-Distribution Layer) and TIV (Through InFO Via) for high-density interconnect and performance. The InFO platform offers various package schemes in 2D and 3D that are optimized for specific applications.
  • TSMC-SoIC®: Is a service platform that provides front-end, 3D inter-chip (3D IC) stacking technologies for re-integration of chiplets partitioned from a system on chip (SoC). The resulting integrated chip outperforms the original SoC in system performance. It also affords the flexibility to integrate additional system functionalities. The platform is fully compatible with CoWoS and InFO, offering a powerful “3Dx3D” system-level solution.

The figure below summarizes how the pieces fit together.

Getting all this to work across the ecosystem requires collaboration. To that end, TSMC has established the 3DFabric Alliance to enable work with 21 industry partners to cover memory, substrate, testing and OSAT collaborations to lower 3DIC design barriers, improve STCO and accelerate 3DIC adoption. The group also drives 3DIC development in tools, flows, IP, and interoperability for the entire 3Dfabric stack. The figure below summarizes the group of organizations that are involved in this work.

There is so much effort going on to support advanced packaging at TSMC. I will conclude with one more example of this work. 3Dblox™ is a standard new language that will help make designing 3D ICs much easier. TSMC created 3Dblox alongside its EDA partners such as Ansys, Cadence, Intel, Siemens, and Synopsys to unify the design ecosystem with qualified EDA tools and flows for TSMC 3DFabric technology. The figure below shows the progress that has been achieved with this effort.

3Dblox Roadmap

To Learn More

I have touched on only some of the great work going on at TSMC to create advanced packaging solutions to pave the way for the next era of multi-die, heterogeneous design. You can get more information about this important effort at TSMC here. And that’s how TSMC advanced packaging overcomes the complexities of multi-die design.

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Real men have fabs!