In a previous article [1], the Rayleigh criterion was mentioned as the resolution limit for the distance between two features. On the other hand, in a following article [2], the minimum pitch was mentioned for the resolution limit for arrayed features. In this article, we reconcile the two by considering gaps between arrayed features,… Read More
ASML A Scenario More Lumpy While Demand and Tech Remain Solid Despite Covid Delays
Covid issues create “lumpy” quarters due to delays
Orders & demand remain solid and strong
2020 Year financials intact so far but ignore Qtrs
Taking prudent actions- no buybacks or guidance
As expected, Covid impacts both shipments & supply chain, ignore the near term lumpiness…
ASML reported revenues… Read More
SPIE 2020 – ASML EUV and Inspection Update
I couldn’t attend the SPIE Advanced Lithography Conference this year for personal reasons, but last week Mike Lercel of ASML was nice enough to walk me through the major ASML presentations from the conference.
Introduction
In late 2018, Samsung and TSMC introduced 7nm foundry logic processes with 5 to 7 EUV layers, throughout … Read More
Lithography Resolution Limits – Arrayed Features
State-of-the-art chips will always include some portions which are memory arrays, which also happen to be the densest portions of the chip. Arrayed features are the main targets for lithography evaluation, as the feature pitch is well-defined, and is directly linked to the cost scaling (more features per wafer) from generation… Read More
Lithography Resolution Limits: Paired Features
As any semiconductor process advances to the next generation or “node”, a sticky point is how to achieve the required higher resolution. As noted in another article [1], multipatterning (the required use of repeated patterning steps for a particular feature) has been practiced already for many years, and many have… Read More
Low Energy Electrons Set the Limits for EUV Lithography
EUV lithography is widely perceived to be the obvious choice to replace DUV lithography due to the shorter wavelength(s) used. However, there’s a devil in the details, or a catch if you will.
Electrons have the last word
The resist exposure is completed by the release of electrons following the absorption of the EUV photon.… Read More
The Need for Low Pupil Fill in EUV Lithography
Extreme ultraviolet (EUV) lithography targets sub-20 nm resolution using a wavelength range of ~13.3-13.7 nm (with some light including DUV outside this band as well) and a reflective ring-field optics system. ASML has been refining the EUV tool platform, starting with the NXE:3300B, the very first platform with a numerical
SPIE 2020 – Applied Materials Material-Enabled Patterning
I wasn’t able to attend the SPIE Advanced Lithography Conference this year for personal reasons, but Applied Materials was kind enough to set up a phone briefing for me with Regina Freed to discuss their Materials-Enabled Patterning announcement.
At IEDM Applied Materials (AMAT) tried to put together a panel across the entire… Read More
A Forbidden Pitch Combination at Advanced Lithography Nodes
The current leading edge of advanced lithography nodes (e.g., “7nm” or “1Z nm”) features pitches (center-center distances between lines) in the range of 30-40 nm. Whether EUV (13.5 nm wavelength) or ArF (193 nm wavelength) lithography is used, one thing for certain is that the minimum imaged pitch … Read More
LithoVision – Economics in the 3D Era
Each year on the Sunday before the SPIE Advanced Lithography Conference, Nikon holds their LithoVision event. This year I had the privilege of being invited to speak for the third consecutive year, unfortunately, the event had to be canceled due to concerns over the COVID-19 virus but by the time the event was canceled I had already… Read More
Flynn Was Right: How a 2003 Warning Foretold Today’s Architectural Pivot