Intel’s IDM 2.0

Intel’s IDM 2.0
by Scotten Jones on 03-24-2021 at 4:00 am

Slide1 1

In January I presented at the ISS conference a comparison of Intel’s, Samsung’s and TSMC’s leading edge offerings. You can read a write-up of my presentation here.

With the problems going on at Intel, that article generated a lot of interest in the investment community, and I have been holding a lot of calls with analysts who are trying… Read More


SPIE 2021 – ASML DUV and EUV Updates

SPIE 2021 – ASML DUV and EUV Updates
by Scotten Jones on 03-17-2021 at 10:00 am

SPIE DUV 2021 ASML NXT4 DryWet Presentation final noWPD2 Page 42

At the SPIE Advanced Lithography Conference held in February, ASML presented the latest information on their Deep Ultraviolet (DUV) and Extreme Ultraviolet (EUV) exposure systems. I recently got to interview Mike Lercel of ASML to discuss the presentations.

DUV

Despite all the attention EUV is getting, most layers are still… Read More


Will EUV take a Breather in 2021?

Will EUV take a Breather in 2021?
by Robert Maire on 02-07-2021 at 6:00 am

KLA EUV Slowdown

-KLAC- Solid QTR & Guide but flat 2021 outlook
-Display down & more memory mix
-KLAC has very solid Dec Qtr & guide but 2021 looks flattish
-Mix shift to memory doesn’t help- Display weakness
-Despite flat still looking at double digit growth
-EUV driven business may see some slowing from digestion

As always, … Read More


ASML – Strong DUV Throwback While EUV Slows- Logic Dominates Memory

ASML – Strong DUV Throwback While EUV Slows- Logic Dominates Memory
by Robert Maire on 01-24-2021 at 6:00 am

ASML SMIC TSMC EUV DUV

ASML has good quarter driven by DUV & Logic (@72%)
– SMIC & other major customer slow EUV plans
– Logic (read that as TSMC) remains key demand led driver
– We are happy memory remains muted given cyclical potential

A very solid quarter with a continued road to growth
The quarter came in at Euro4,254B… Read More


The Complexities of the Resolution Limits of Advanced Lithography

The Complexities of the Resolution Limits of Advanced Lithography
by Fred Chen on 01-10-2021 at 6:00 am

The Complexities of the Resolution Limits of Advanced Lithography

For advanced lithography used to shrink semiconductor device features according to Moore’s Law, resolution limits are an obvious consideration. It is often perceived that the resolution limit is simply derived from a well-defined equation, but nothing can be further from the truth.

Optical Lithography: the fine print

Read More

CD-Pitch Combinations Disfavored by EUV Stochastics

CD-Pitch Combinations Disfavored by EUV Stochastics
by Fred Chen on 11-29-2020 at 6:00 am

CD Pitch Combinations Disfavored by EUV Stochastics

Ongoing investigations of EUV stochastics [1-3] have allowed us to map combinations of critical dimension (CD) and pitch which are expected to pose a severe risk of stochastic defects impacting the use of EUV lithography. Figure 1 shows a typical set of contours of fixed PNOK (i.e., the probability of a feature being Not OK due… Read More


Downplaying SMIC – Uplaying TSMC

Downplaying SMIC – Uplaying TSMC
by Robert Maire on 11-01-2020 at 6:00 am

SMIC China TSMC
  • KLAC sports solid QTR & Guide- Foundry & Logic drivers
  • Management remains dismissive of SMIC embargo
  • Execution & financials are solid but macro headwinds remain
  • Nice September Quarter

KLA reported revenue of $1.54B and Non GAAP EPS of $3.03 versus street expectations of $1.49B and EPS of $2.77. Guidance is for revenues… Read More


ASML is Strong Because TSMC is Hot!

ASML is Strong Because TSMC is Hot!
by Robert Maire on 10-15-2020 at 10:00 am

TSMC ASML EUV 2020
  • ASML has strong quarter lead by great Taiwan and EUV
  • EUV “crossed over” DUV as revenue leader- signaling new era
  • Taiwan doubles, China grows, Korea weaker, US further behind

ASML hits great numbers
ASML reported revenues of Euro 4B, with income of Euro 2.54EPS, both beating estimates handily. Ten EUV systems were … Read More


Highlights of the TSMC Technology Symposium – Part 1

Highlights of the TSMC Technology Symposium – Part 1
by Tom Dillinger on 09-04-2020 at 8:00 am

A72 core high density

Recently, TSMC held their 26th annual Technology Symposium, which was conducted virtually for the first time.  This article is the first of three that attempts to summarize the highlights of the presentations.

This article focuses on the TSMC process technology roadmap, as described by the following executives:

  • Y.J. Mii, SVP,
Read More

Fully Self-Aligned 6-Track and 7-Track Cell Process Integration

Fully Self-Aligned 6-Track and 7-Track Cell Process Integration
by Fred Chen on 08-23-2020 at 6:00 am

Fully Self Aligned 6 Track and 7 Track Cell Process Integration

For the 10nm – 5nm nodes, the leading-edge foundries are designing cells which utilize 6 or 7 metal tracks, entailing a wide metal line for every 4 or 5 minimum width lines, respectively (Figure 1).

Figure 1. Left: a 7-track cell. Right: a 6-track cell.

This is a fundamental vulnerability for lithography, as defocus can change… Read More