I like to quiz people on which country is the one where the most leading edge research on semiconductors is done. People reflexively answer USA or maybe Taiwan or Japan. Nobody who doesn’t already know the answer would pick Belgium. After all the EU headquarters is there not because Belgium is important but because Belgium… Read More
Tag: euv
Life Without EUV: SPIE Day 2
I previously published a summary of day 1 of SPIE and I wanted to follow up with observations from successive days.
SPIE, the international society for optics and photonics, was founded in 1955 to advance light-based technologies.Serving more than 256,000 constituents from approximately 155 countries, the not-for-profit … Read More
EUV Makes Progress and Other Observations From SPIE
The SPIE Advanced Lithography Conference is the world’s premier conference for patterning techniques utilized to manufacture semiconductors. At any given time during the conference there are multiple parallel sessions so it is impossible to see all of the papers presented. Prior to the conference I reviewed and blogged on … Read More
ASML ASyMptotic progress- When will we get to EUV?
- ASML making progress – but is it fast enough?
- ASML has missed 10nm , can it catch 7nm? An economic question
- Day one at SPIE- Better tone than last year but still cautious
1000 simulated wafers versus 700 simulated
At the opening of the SPIE conference ASML announced that TSMC had reached 1000 wafers a day “exposed”… Read More
SPIE Advanced Lithography Preview
Next week is the SPIE Advanced Lithography Conference in San Jose, the premier conference for advanced lithography used to produce state-of-the-art semiconductors. Last year I blogged after the conference about some of the key points I heard at the conference and this year I plan to do the same.
7nm node is arriving, which ones will continue past 2020?
‘Laughing Buddha’ is eternal, but for semiconductor industry, I must say it’s ‘laughing Moore’. Moore made a predictive hypothesis and the whole world is inclined to let that continue, eternally? When we were at 28nm, we weren’t hoping to go beyond 20/22nm; voices like ‘Moore’s law is dead’ started emerging. Today, we are already… Read More
TSMC Bringing EUV Into Production
Last week was ASML’s investor day. I wasn’t there and they haven’t yet got the material posted on their website, so this is all second hand information. As you know, if you have read any of my comments on EUV, I have been dubious about whether EUV would ever work for production.
The three big problems seem to be:
- source
EUV Pellicles
Shakespeare reckoned that a man went through seven stages in his life.All the world’s a stage, And all the men and women merely players. They have their exits and their entrances, And one man in his time plays many parts, His acts being seven ages.
Well, an EUV mask seems to only go through three main stages:
[LIST=1]
SEMICON Update: 450mm, EUV, FinFET, and More
I spent all of last week at SEMICON West meeting with customers, potential customers, partners and various industry analysts and experts. I was involved in many interesting discussions over the course of the week and I thought I would share some of the more interesting observations:
Alternate Fin Materials Pushed Out
I have for… Read More
EUV and DSA from Imec and #semiconwest
All the details of how we will build semiconductors going forward depend on whether we have EUV in our arsenal or not. Imec is very close to this since they work closely with ASML (who are about an hour and half’s drive away just outside Eindhoven in the Netherlands). At the imec technology symposium we were given a quick summary… Read More