Computational Lithography, Scaling’s Best Friend

Computational Lithography, Scaling’s Best Friend
by glforte on 11-03-2010 at 11:51 pm

By Joseph Sawicki, Vice President & General Manager, Design to Silicon Division
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It is one of the more amazing stories in the continued march of Moore’s Law over the past four nodes. Previously scaling was enabled solely though changes in the physical domain, whether through decreasing the wavelength of light,… Read More