EUV Extreme Ultraviolet Lithography Wiki

EUV Extreme Ultraviolet Lithography Wiki
by Daniel Nenni on 05-28-2023 at 4:19 pm

Extreme Ultraviolet Lithography (EUV or EUVL) is an advanced semiconductor manufacturing technology used to print the smallest features on integrated circuits (ICs), particularly at leading-edge nodes such as 7nm, 5nm, 3nm, and below. EUV uses light with a wavelength of 13.5 nanometers, which is in the extreme ultraviolet… Read More