EUV Extreme Ultraviolet Lithography Wiki

Published by Daniel Nenni on 05-28-2023 at 4:19 pm
Last updated on 05-28-2023 at 4:20 pm

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EUV stands for Extreme Ultraviolet. It refers to a type of electromagnetic radiation with a wavelength range between 10 and 124 nanometers, which lies in the extreme ultraviolet part of the electromagnetic spectrum. EUV radiation has shorter wavelengths and higher energy than visible light.

EUV technology has gained significance in recent years, particularly in the field of semiconductor manufacturing. It is used in a process called EUV lithography, which is a key technique for creating smaller, more advanced microchips. EUV lithography uses EUV light to etch patterns onto silicon wafers, enabling the production of microchips with higher transistor densities and improved performance.

The development and implementation of EUV technology have been challenging due to the absorption of EUV light by various materials and the requirement for highly specialized equipment. However, significant progress has been made, and EUV lithography is now being used in advanced semiconductor fabs to produce the latest generation of computer chips.

EUV technology offers several advantages over traditional optical lithography techniques, including higher resolution, improved accuracy, and the ability to print smaller features. It has become essential for keeping up with the demands of Moore’s Law, which states that the number of transistors on a microchip doubles approximately every two years.

In addition to its applications in semiconductor manufacturing, EUV radiation has also found uses in scientific research, particularly in the study of materials and biological systems at the nanoscale. It has enabled researchers to probe and manipulate matter with unprecedented precision, leading to breakthroughs in various fields.

Overall, EUV technology has revolutionized the semiconductor industry and is expected to play a crucial role in driving advancements in computing, communication, and other technology-driven sectors in the future.


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