The previous post in this series provided an overview of FinFET devices. This article will briefly cover FinFET fabrication.
The major process steps in fabricating silicon fins are shown in Figures 1 through 3. The step that defines the fin thickness uses Sidewall Image Transfer (SIT). Low-pressure chemical vapor (isotropic)… Read More
This is the first of a multi-part series, to introduce FinFET technology to SemiWiki readers. These articles will highlight the technology’s key characteristics, and describe some of the advantages, disadvantages, and challenges associated with this transition. Topics in this series will include FinFET fabrication,… Read More
It was an honor to see DR. Chenming Huspeak and to learn more about FinFets, a technology he has championed since 1999. Chenming is considered an expert on the subject and is currently a TSMC Distinguished Professor of Microelectronics at University of California, Berkeley. Prior to that he was the Chief Technology Officer of TSMC.… Read More
The 1999 IDM paper Sub 50-nm FinFET: PMOSstarted the 3D transistor ball rolling, then in May of 2011 Intel announceda production version of a 3D transistor (TriGate) technology at 22nm. Intel is the leader in semiconductor process technologies so you can be sure that others will follow. Intel has a nice “History of the Transistor… Read More
Sorry to disappoint but my 2 hours at the Intel RNB was a very positive experience. It is much more fun writing negative things about industry leaders because I enjoy the resulting hate mail and personal attacks, but the candor and transparency of the Intel guys won me over. They even asked ME questions which was a bit telling. I also… Read More
Intel’s new Tri-Gate technology is causing quite a stir on the stock chat groups. Some have even said if Intel uses its Tri-Gate technology on only Intel processors ARM will be in deep deep trouble. These guys are “Intel Longs” of course and they are battling “Intel Shorts” with cut and paste news clips.
“ARM is in trouble & this… Read More
Power grids all over the world are already overloaded even without the slew of new electronic gadgets and cars coming out this year. At ISSCC, Dr. Jack Sun, TSMC Vice President of R&D and Chief Technology Officer made the comparison of a human brain to the closest thing available in silicon, a graphical processing unit (GPU).… Read More
