Advanced Process Development is Much More than just Litho

Advanced Process Development is Much More than just Litho
by Tom Dillinger on 12-16-2020 at 10:00 am

Vt distribution

The vast majority of the attention given to the introduction of each new advanced process node focuses on lithographic updates.  The common metrics quoted are the transistors per mm**2 or the (high-density) SRAM bit cell area.  Alternatively, detailed decomposition analysis may be applied using transmission electron microscopy… Read More


Highlights of the TSMC Technology Symposium – Part 1

Highlights of the TSMC Technology Symposium – Part 1
by Tom Dillinger on 09-04-2020 at 8:00 am

A72 core high density

Recently, TSMC held their 26th annual Technology Symposium, which was conducted virtually for the first time.  This article is the first of three that attempts to summarize the highlights of the presentations.

This article focuses on the TSMC process technology roadmap, as described by the following executives:

  • Y.J. Mii, SVP,
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