Advanced Process Development is Much More than just Litho

Advanced Process Development is Much More than just Litho
by Tom Dillinger on 12-16-2020 at 10:00 am

Vt distribution

The vast majority of the attention given to the introduction of each new advanced process node focuses on lithographic updates.  The common metrics quoted are the transistors per mm**2 or the (high-density) SRAM bit cell area.  Alternatively, detailed decomposition analysis may be applied using transmission electron microscopy… Read More