## The Complexities of the Resolution Limits of Advanced Lithography

The Complexities of the Resolution Limits of Advanced Lithography
by Fred Chen on 01-10-2021 at 6:00 am

For advanced lithography used to shrink semiconductor device features according to Moore’s Law, resolution limits are an obvious consideration. It is often perceived that the resolution limit is simply derived from a well-defined equation, but nothing can be further from the truth.