‘Laughing Buddha’ is eternal, but for semiconductor industry, I must say it’s ‘laughing Moore’. Moore made a predictive hypothesis and the whole world is inclined to let that continue, eternally? When we were at 28nm, we weren’t hoping to go beyond 20/22nm; voices like ‘Moore’s law is dead’ started emerging. Today, we are already… Read More
Tag: euv
TSMC Bringing EUV Into Production
Last week was ASML’s investor day. I wasn’t there and they haven’t yet got the material posted on their website, so this is all second hand information. As you know, if you have read any of my comments on EUV, I have been dubious about whether EUV would ever work for production.
The three big problems seem to be:
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EUV Pellicles
Shakespeare reckoned that a man went through seven stages in his life.All the world’s a stage, And all the men and women merely players. They have their exits and their entrances, And one man in his time plays many parts, His acts being seven ages.
Well, an EUV mask seems to only go through three main stages:
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SEMICON Update: 450mm, EUV, FinFET, and More
I spent all of last week at SEMICON West meeting with customers, potential customers, partners and various industry analysts and experts. I was involved in many interesting discussions over the course of the week and I thought I would share some of the more interesting observations:
Alternate Fin Materials Pushed Out
I have for… Read More
EUV and DSA from Imec and #semiconwest
All the details of how we will build semiconductors going forward depend on whether we have EUV in our arsenal or not. Imec is very close to this since they work closely with ASML (who are about an hour and half’s drive away just outside Eindhoven in the Netherlands). At the imec technology symposium we were given a quick summary… Read More
Imec’s Process Secret Decoder Ring
To wrap up Semicon West, let’s go back to Monday and the imec presentations. In fact, An Steegen’s presentation titled The Semiconductor Roadmap. She covered a lot of ground, but some of her slides contain a wealth of information. Let’s look at the options for 10nm, 7nm and a little 5nm, what imec call N10, N7 and… Read More
EUV Will Never Happen
I had lunch today with a guy who has to remain nameless. But he is on the edge of the semiconductor lithography thing. He told me EUV will never happen. Of course lots of people have said that. Me for one. But he said everyone knows it. The investment community, the foundries, everyone. Intel put money into ASML in the hopes that it would… Read More
EUV Slips a Year Per Year…Or More
I was at EDPS in Monterey the last couple of days. It is one of the most interesting conferences to attend. Go next year since you already missed it this year. It is not big but the quality of the content is high. Historically the dinner in the middle is in the Monterey Yacht Club and there is a keynote speech. A few years ago it was me but this… Read More
450mm Delayed and Other SPIE News
Last week I attended the SPIE Advanced Technology Conference. There were a lot of interesting papers and as is always the case at these conferences, there was a lot of interesting things to learn from talking to other attendees on the conference floor.
The first interesting information from the conference floor was that 450mm is… Read More
The State of 450mm Wafers. And Intel Gossip
Paul Farrar, the General Manager of the Global 450mm Consortium (G450C) presented at the SEMI ISS conference today. What is G450C, it is a public-private consortium to develop a cost-effective 450mm wafer fabrication infrastructure, develop equipment prototypes and coordinate the industry move to 450mm. It is located in Albany… Read More