Spot Pairs for Measurement of Secondary Electron Blur in EUV and E-beam Resists

Spot Pairs for Measurement of Secondary Electron Blur in EUV and E-beam Resists
by Fred Chen on 08-14-2022 at 8:00 am

Spot Pairs for Measurement of Secondary Electron Blur in EUV

There is growing awareness that EUV lithography is actually an imaging technique that heavily depends on the distribution of secondary electrons in the resist layer [1-5]. The stochastic aspects should be traced not only to the discrete number of photons absorbed but also the electrons that are subsequently released. The electron… Read More


Has KLA lost its way?

Has KLA lost its way?
by Robert Maire on 05-01-2022 at 6:00 am

KLA SPIE 2022

-KLA has another great QTR in face of overwhelming demand
-Supply chain issues obliterated by backlog
-Longer term technology leadership concerns are increasing
-We see limited upside near term & remain cyclically cautious

Another great quarter- demand remains super strong

KLA’s performance remains great as does… Read More


EUV Continues Roll Out With Lumpy Quarters Ahead

EUV Continues Roll Out With Lumpy Quarters Ahead
by Robert Maire on 04-20-2018 at 12:00 pm

ASML put up good results with revenues of Euro2.285B versus street of Euro2.22B and EPS of Euro1.26 versus street of Euro1.17. Guide is for Euro2.55B versus street of Euro2.46B but EPS of Euro1.16 versus street EPS of Euro1.35 on lower gross margins, slipping from 48% to 43%.

A couple of EUV systems have slipped out. This is not surprising… Read More