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According to this article, Intel will start using EUV in 2023 on the Meteor Lake PC processors and Granite Rapids server processors. It's about four years after TSMC started N7+ mass production with EUV technology in 2019.
Is it because EUV not suitable for Intel's products until 2023 or Intel can afford not to use it until 2023 or something else?
Lasers and molten tin: Inside Intel’s plans for the world’s most advanced chip-making process
After years of manufacturing struggles, Intel will make upcoming chips using extreme ultraviolet lithography, which is precise enough to hit your thumb with a laser pointer from the moon.
10nm screwed up Intel’s EUV experience. Intel did not feel EUV would be ready for 10nm, which was true if Intel 10nm hadn‘t been delayed 4 years. So EUV waited for Intel 7nm ( now 4nm) which was also delayed. Intel 4nm is now expected 2H 2022 so that’s when Intel EUV will be in full production. Not as many EUV layers as TSMC N3 but EUV just the same. Intel 3nm (2H 2023) will have full EUV (20+ layers). And that ends the FinFET era. I’m not sure how EUV will play with GAA Yet. We should see more on that next year.