As the semiconductor process further scales down to 2nm and beyond, the multi-patterning technology has emerged as the clear choice of the routing metal layers even within the era of extreme ultraviolet (EUV) lithography.
The stitching technique within multi-patterning can divide a node into multiple nodes, each of which can be assigned to different colors to prevent color conflicts.
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The stitching technique within multi-patterning can divide a node into multiple nodes, each of which can be assigned to different colors to prevent color conflicts.
An innovative stitching solution for multipatterning compliant routing metal layers beyond 2nm
Multipatterning technology is a class of technologies for IC manufacturing to make the density of features of a layer beyond the limitations of a single exposure lithography. As the semiconductor process further scales down to 2nm and beyond, the multi-patterning technology has emerged as the...