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Russia’s First 350nm Lithography Machine Receives Orders, 130nm Model to Follow

tonyget

Well-known member
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According to a recent report by the Russian WeChat News Agency, the country has successfully developed its first 350nm lithography machine.

Moscow Mayor Sergey Sobyanin announced on his Telegram channel that the Moscow-based Zelenograd Nanotechnology Center has completed the development of Russia’s first 350nm lithography machine, a key piece of equipment for semiconductor manufacturing.

Sobyanin noted that fewer than ten companies worldwide are capable of manufacturing lithography equipment. Now, with Russia joining their ranks, the country has taken a major step toward independent microelectronics production and full technological sovereignty.

Anatoly Kovalev, General Manager of the Zelenograd Nanotechnology Center, stated that the project was successfully implemented in collaboration with the Belarusian company Planar, with testing completed in December 2024. The machine has already secured orders from customers.

For the first time, Russia’s 350nm lithography equipment uses a solid-state laser as the radiation source, which offers advantages such as high power, greater energy efficiency, durability, and a narrower spectrum.

Furthermore, the Zelenograd Nanotechnology Center is prepared for mass production of the new equipment. The center is also working under a second national contract to develop a 130nm lithography machine, which is expected to be completed by 2026.

 
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