Epitaxy: Not Just For PMOS Anymore

Epitaxy: Not Just For PMOS Anymore
by Paul McLellan on 07-25-2013 at 2:25 pm

At Semicon I met with Applied Materials to learn about epitaxy. This is when a monocrystalline film is grown on the substrate which takes on a lattice structure that matches the substrate. It forms a high purity starting point for building a transistor and is also the basis of the strain engineering in a modern process.

Since holes… Read More