It's not clear to me EXACTLY what they have that they believe to be new, ie what they are selling. This masters thesis, for example
Simulation-based Study of Super-steep Retrograde Doped Bulk FinFET Technology and 6T-SRAM Yield | EECS at UC Berkeley
seems to consider the point to be well-known.
The issue is not any fancy quantum effects, it is (as I understand it) that by placing a layer of oxygen at the base of a finFET, you prevent diffusion of dopants between the fin and the bulk semiconductor, and this allows you to better control two distinct dopant levels in these two geometrically distinct areas, without leakage from one to the other.
This is nice, and gives you a few (up to maybe 10%) performance boost, but it's not a "game changer", it's simply one in a menu of possible options for future improvements. It gets you much the same advantages as finFET on SOI, so it all really boils down to which costs more, and which delivers slightly more bang.
I don't know exactly how patents work in the semiconductor space. Presumably you can't patent the knowledge that an oxygen layer in silicon has the properties it has. You likely can patent a specific way of embedding that oxygen layer in silicon, and that's likely the content of Atomera's patents. The question, then, is whether there are alternative (perhaps better, perhaps adequate) ways to create that same layer.
And as far as everyone growing rich is concerned, regardless of how solid the patent is, there's an absolute ceiling on how much it is worth based on the fact that no-ones going to pay more for this tech than the cost of building a finFET on SOI.
Mears & Atomera seems to have a lot of interest in superlattices, ie essentially artificial semiconductors. At some point their time will come, but again it's not clear to me EXACTLY what Atomera is offering here that's special. Superlattices (in vastly more complex configurations than are imagined for logic and memory) are being constructed everyday right now, either through MOCVD or e-beam, primarily for the purposes of high end optics, like quantum cascade lasers. I could imagine superlattice wafers being manufactured (like SOI wafers are manufactured) as a better substrate for all the rest of the complexity of manufacturing a CPU, but that's not a novel idea, it's just one that's waiting around for the economics to force it to become necessary.