The Matrix, your ultimate OPC

The Matrix, your ultimate OPC
by Beth Martin on 05-06-2014 at 12:47 pm

One of the many consequences of shrinking process nodes is that traditional OPC can no longer achieve good pattern fidelity with reasonable turn-around-time. But there is a solution; we made it ourselves and call it matrix OPC.

First, let’s explore the problems with traditional optical proximity correction (OPC) when applied… Read More