For me personally EUV has been something of a roller coaster ride over the last several years. I started out a strong believer in EUV but then at the SPIE Advanced Lithography Conference in 2014 TSMC gave a very negative assessment of EUV, and there was a SEMATECH paper on high NA EUV that struck me as extremely unlikely to succeed. I … Read More
Tag: asml euv
To EUV, or not to EUV, that is the question!
SPIE is next week so if you would like to meet me in person that is where I will be. SPIE is the big lithography and patterning conference for semiconductor professionals. Since I work with the foundries during my day job, SPIE is an important conference. SemiWiki blogger Scott Jones will also be there. During the day Scott does semiconductor… Read More