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Besides being expensive on their own, EUV pellicles limited throughput due to transmission as well as rupturing or destabilizing faster at higher power. So pellicle-less procedures have been developed. DUV pellicles are much cheaper and do not limit throughput this way but still need to deal with haze.
For sure, all I meant was at least as far as I understand, of the 4 large manufacturers (Intel, Samsung, TSMC, GF) Intel has been using pells the longest and have been the most dedicated historically. I had heard of internal debates about how Intel was wasting its time with pells because TSMC just took the cost hit to the masks over the loss of MA and that allowed them to just take higher supply and seem more stable to customers.
I am unsure how accurate what I was told was, but essentially it was that early EUV, especially lower power era, Intel was only pell user for a few years.
I can't verify any of this it was all anecdotal conversation with employees from different companies. I had just heard for a few years that Intel was the only one deep into Pellicles and wasnt sure if there'd be a pay off and if they had ever made the evaluation to do things inhouse like this
