Stochastics: Yield-Killing Gap No One Wants to Talk About

[Investor1234]

So, will it be used for increasing the throughput at same dose, or increasing the dose at same throughput? Again, the net benefit of increasing the dose depends on the resist.

Yes I think effectively at each new node they increase the dose at the same throughput to hit their dimension targets (since as you know the stochastic issues get more difficult the smaller the feature size).

 

[Fred Chen]

Yes I think effectively at each new node they increase the dose at the same throughput to hit their dimension targets (since as you know the stochastic issues get more difficult the smaller the feature size).

Yes, the higher power gives that option. Resist loss has been observed to increase with higher dose, which can aggravate some types of defects.

 

[Fred Chen]

The dose increase required to get the photon shot noise to pre-EUV levels will be exorbitant: https://semiwiki.com/lithography/357643-facing-the-quantum-nature-of-euv-lithography/