Advanced semiconductor fabrication technology is what makes it possible to pack more and more transistors into a sq.mm of a wafer. The rapidly increasing demand for advanced-process-based chips has created huge market opportunities for semiconductor manufacturing equipment vendors. According to SEMI, worldwide sales … Read More
Plasma Etching, ALE, and RIE (SEMI University)
This course discusses the fundamentals of plasma assisted phenomena and reactive ion etching (RIE) processes. The emphasis is on the physical and chemical processes that determine the consequences of a reactive gas plasma/surface interaction. The role of energetic ions as encountered in RIE systems is discussed in detail … Read More