Plasma Etching, ALE, and RIE (SEMI University)

Plasma Etching, ALE, and RIE (SEMI University)
by Admin on 07-18-2025 at 9:46 am

This course discusses the fundamentals of plasma assisted phenomena and reactive ion etching (RIE) processes. The emphasis is on the physical and chemical processes that determine the consequences of a reactive gas plasma/surface interaction. The role of energetic ions as encountered in RIE systems is discussed in detail … Read More


Getting Ahead with Semiconductor Manufacturing Equipment and Related Plasma Reactors

Getting Ahead with Semiconductor Manufacturing Equipment and Related Plasma Reactors
by Kalar Rajendiran on 08-25-2022 at 6:00 am

Figure 1 Dry Etching Process Classification

Advanced semiconductor fabrication technology is what makes it possible to pack more and more transistors into a sq.mm of a wafer. The rapidly increasing demand for advanced-process-based chips has created huge market opportunities for semiconductor manufacturing equipment vendors. According to SEMI, worldwide sales … Read More