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The Matrix, your ultimate OPCby Beth Martin on 05-06-2014 at 12:47 pmCategories: EDA
One of the many consequences of shrinking process nodes is that traditional OPC can no longer achieve good pattern fidelity with reasonable turn-around-time. But there is a solution; we made it ourselves and call it matrix OPC.
First, let’s explore the problems with traditional optical proximity correction (OPC) when applied… Read More