Podcast EP364: The Broad Impact of Advanced Mask Solutions, Today and Tomorrow with Dr. Germain Fenger

Podcast EP364: The Broad Impact of Advanced Mask Solutions, Today and Tomorrow with Dr. Germain Fenger
by Daniel Nenni on 09-04-2026 at 10:00 am

Daniel is joined by Dr. Germain Fenger, Senior Director of Product Management at Synopsys where he leads advanced mask solutions and computational lithography technologies. With a background spanning semiconductor manufacturing, lithography research, engineering, and product leadership, Germain has held roles at imec,… Read More


Inverse Lithography Technology – A Status Update from TSMC

Inverse Lithography Technology – A Status Update from TSMC
by Tom Dillinger on 06-02-2022 at 6:00 am

ILT mask rules

“Inverse lithography technology (ILT) represents the most significant EDA advance in the last two decades.”  Danping Peng from TSMC made that assertion at the recent SPIE Advanced Lithography + Patterning Conference, in his talk entitled:  ILT for HVM:  History, Present, and Future.  This article summarizes the highlights… Read More


Magic? No! It’s Computational Lithography

Magic? No! It’s Computational Lithography
by Beth Martin on 02-11-2013 at 7:00 am

The industry plans to use 193nm light at the 20nm, 14nm, and 10nm nodes. Amazing, no? There is no magic wand; scientists have been hard at work developing computational lithography techniques that can pull one more rabbit out of the optical lithography hat.

Tortured metaphors aside, the goal for the post-tapeout flow is the same… Read More