VLSI Technology Symposium – Imec Forksheet

VLSI Technology Symposium – Imec Forksheet
by Scotten Jones on 07-06-2021 at 6:00 am

VLSI2021 T2 1 Mertens v2 Page 05

FinFETs devices are reaching their limits for scaling. Horizontal Nanosheets (HNS) are a type of Gate All Around (GAA) device that offers better scaling and performance per unit area. HNS is the logical next step from FinFETs because HNS processing is similar to FinFETs with a limited number of process changes required.

At the … Read More