Imec Buried Power Rail and Backside Power Delivery at VLSI

Imec Buried Power Rail and Backside Power Delivery at VLSI
by Scotten Jones on 06-28-2022 at 6:00 am

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At the VLSI Technology Symposium Imec presented on Buried Power Rails (BPR) and Backside Power Delivery (BSPD) in a paper entitled: “Scaled FinFETs Connected by Using Both Wafer Sides for Routing via Buried Power Rails”. I recently had a chance to interview one of the authors, Naoto Horiguchi about the work. I have interviewed … Read More


VLSI Symposium 2020 – Imec Buried Power Rail

VLSI Symposium 2020 – Imec Buried Power Rail
by Scotten Jones on 07-26-2020 at 10:00 am

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The 2020 VLSI Technology Symposium was held as a virtual conference from June 14th through June 19th. At the symposium Imec gave an interesting paper on Buried Power Rails (BPR) and I had a chance to interview one of the authors, Anshul Gupta.

As logic devices continue to scale down metal pitch is reaching a limit. Imec defines a pitch… Read More