Semiwiki on LinkedIn Semiwiki on Facebook Semiwiki on Twitter Register / Log in 
Array
(
    [content] => 
    [params] => Array
        (
            [0] => /forum/threads/shared-pain-shared-gain-the-start-of-a-monopoly-in-leading-edge-logic-chip-manufacturing.20948/page-4
        )

    [addOns] => Array
        (
            [DL6/MLTP] => 13
            [Hampel/TimeZoneDebug] => 1000070
            [SV/ChangePostDate] => 2010200
            [SemiWiki/Newsletter] => 1000010
            [SemiWiki/WPMenu] => 1000010
            [SemiWiki/XPressExtend] => 1000010
            [ThemeHouse/XLink] => 1000970
            [ThemeHouse/XPress] => 1010570
            [XF] => 2021770
            [XFI] => 1050270
        )

    [wordpress] => /var/www/html
)

Shared pain shared gain: the start of a monopoly in leading-edge logic chip manufacturing ?

fansink said:
What specifically is disturbing in this patent, and why?
Click to expand...
The EUV system would be under several Pa vacuum containing hydrogen, yet in the patent they assume it is air with some hydrogen mixed in ("Because the hydrogen is lighter than air, it rises in a vertical direction relative to the air.") Hydrogen has the least absorption of EUV.
 
Fred Chen said:
The EUV system would be under several Pa vacuum containing hydrogen, yet in the patent they assume it is air with some hydrogen mixed in ("Because the hydrogen is lighter than air, it rises in a vertical direction relative to the air.") Hydrogen has the least absorption of EUV.
Click to expand...

You are correct, when I developed the EUV source collector mirror cooler, the partial vacuum contained hydrogen only.

Due to optical distortion, the cooler could not make contact with the silicon collector mirror, so I used the partial pressure of hydrogen, and gas gap conductance, for the solution.
 
You must log in or register to reply here.
Back
Top