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BEOL M0 32nm with EUV Low NA0.33 Single Exposure, Nvidia cuLitho helps but not easy for HVM

N

NY_Sam2

Member
. Intel 18A, BEOL M0 36/32nm with EUV Low NA0.33 Single Exposure, announced by Intel
. TSMC N3/N2, BEOL M2 ~32nm with EUV Low NA0.33 Single Exposure? no announcement yet by TSMC
. below, SEM images by Nvidia & IMEC, cuLitho helps, link = https://arxiv.org/abs/2602.15036, 2026-Jan
. both Intel & TSMC using cuLitho (not for R&D but) for HVM already?

1773274895586.png
 
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