Intel FAB 52/62 are High-Na capable
- Thread starter siliconbruh999
- Start date
Xebec
Well-known member
According to ASML on X:
Time to nerd out! Here are some key specs of our High NA EUV system:
Imaging resolution: 8 nanometers
Productivity: ≥185 wafers per hour (at 20mJ/cm²) with a roadmap to >220 in 2025
Optics type: Anamorphic mirrors
System dimensions: 14 m x 4 m x 4 m
System weight: 150,000 kg
(Just over 13 feet tall for those of us raised in a number system that makes no sense).
Time to nerd out! Here are some key specs of our High NA EUV system:
Imaging resolution: 8 nanometers
Productivity: ≥185 wafers per hour (at 20mJ/cm²) with a roadmap to >220 in 2025
Optics type: Anamorphic mirrors
System dimensions: 14 m x 4 m x 4 m
System weight: 150,000 kg
(Just over 13 feet tall for those of us raised in a number system that makes no sense).