Urgent request for volunteers or nominations to a new SEMI standards committee

[mhagmann]

Two weeks ago, at a meeting of the SEMI International Standards Committee, I was asked to form a committee to define a standard for the carrier profiling of semiconductor devices at and below the 7-nm node. The international and national roadmaps do not specify the methods,or limits for the accuracy, precision, or resolution, in carrier profiling. An initial examination of the SEMI standards suggests they are not appropriate below the 90-nm technology node. There is an urgent need for a new standard because carrier profiling tests the nanoscale operation of a semiconductor device to enable root-cause fault analysis to increase the yield in production. One metrologist wrote that this “desperate situation began in earnest at the 32-nm technology node”. We already have 8 Members and 3 Advisers but this committee should contain a wider sample of the semiconductor community. Committee members, who must also be members of SEMI, may attend the meetings. The Advisers, as well as the committee members, will communicate by Skype or email. Please reply to this request by in-mail.

 

[mhagmann]

Thank you for your help. Now we have 12 members for the committee including NIST (a member of SEMI) as well as the principal semiconductor companies at or near the 7-nm node. More would be welcome.