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Samsung to develop own EUV pellicle

Fred Chen


Samsung Electronics is developing its own 'Pellicle', which is considered an essential part of the extreme ultraviolet (EUV) process. It is a strategy to strengthen the competitiveness of the EUV process used for ultra-fine semiconductor manufacturing. Samsung Electronics appeared as a competitor in the pellicle market where ASML, Mitsui Chemicals, S&S Tech, and FST are participating.

Samsung Electronics announced the news of EUV pellicle development at the recently held 'Samsung Foundry Forum 2021'. Gil-hyeon Choi, head of Samsung Electronics' foundry manufacturing center (Vice President) said, "We have secured an EUV pellicle with a transmittance of 82%, and we plan to raise the transmittance to 88% by the end of the year." Center Director Choi added that he plans to conduct quality tests from the first half of next year and put them into mass production at the end of the year.