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Questions about fab tool downtime

J

jms_embedded

Active member
Can anyone give me more of a flavor of what unscheduled fab tool downtime is like?

1. How often does it occur for a given tool? (once a day/week/month/year?)

2. What's the usual symptom? Performance characteristics out of spec? (test wafer goes through, gets inspected, fails some criteria) Tool stops with an error code? Some motor or bearing breaks?

3. What kinds of tools go down the most / least often?
 
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