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Intel 4 goes back to copper metallization

Fred Chen

Moderator
One feature from the Intel 4 process paper at this year's VLSI Technology Symposium seems to indicate the use of cobalt was a key issue for Intel 10nm (now Intel 7).

Intel 4 interconnect stack.png

Source: tip sheet
 

Daniel Nenni

Admin
Staff member
Tom Dillinger will be attending this conference and blogging about it. There are some great papers and it is live again in Hawaii. Rough assignment!
 
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