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Intel 4 goes back to copper metallization

F

Fred Chen

Moderator
One feature from the Intel 4 process paper at this year's VLSI Technology Symposium seems to indicate the use of cobalt was a key issue for Intel 10nm (now Intel 7).

Intel 4 interconnect stack.png

Source: tip sheet
 
Tom Dillinger will be attending this conference and blogging about it. There are some great papers and it is live again in Hawaii. Rough assignment!
 
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