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John R. Cary is professor of physics at the University of Colorado at Boulder and CTO of Tech-X Corporation. He received his PhD from the University of California, Berkeley, in Plasma Physics. Prof. Cary worked at Los Alamos National Laboratory and the Institute for Fusion Studies at the University of Texas, Austin, prior to joining… Read More
Readers of SemiWiki will be well aware of the challenges the industry has faced in photolithography in moving to new nodes, which drove the development of new EUV light sources as well as new masking techniques. Plasma etching is another key step in chip manufacturing that has also seen new challenges in the development of new sub-10nm… Read More
