To wrap up Semicon West, let’s go back to Monday and the imec presentations. In fact, An Steegen’s presentation titled The Semiconductor Roadmap. She covered a lot of ground, but some of her slides contain a wealth of information. Let’s look at the options for 10nm, 7nm and a little 5nm, what imec call N10, N7 and… Read More
Tag: quadruple patterning
Triple Patterning
As you can’t have failed to notice by now, 28nm is the last process node that does not require double patterning. At 20nm and below, at least some layers require double patterning. The tightest spacing is typically not the transistors but the local interconnect and, sometimes, metal 1.
In the litho world they call double patterning… Read More