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EUV: No Pellicleby Paul McLellan on 07-22-2012 at 10:00 pmCategories: General
There’s a dirty secret problem about EUV that people don’t seem to to be talking about. There’s no pellicle on a EUV mask. OK, probably you have no idea what that means, a lot of jargon words, nor why it would be important, but it seems to me it could be the killer problem for EUV.
In refractive masks, you print a pattern… Read More