In a former life I was the GM of a business where we built specialized structures used for semiconductor process bring-up, characterization and monitoring. These monitoring structures were placed in wafer scribe-lines and were used to monitor key parameters during wafer processing. The structures provided feedback to automated… Read More
The industry plans to use 193nm light at the 20nm, 14nm, and 10nm nodes. Amazing, no? There is no magic wand; scientists have been hard at work developing computational lithography techniques that can pull one more rabbit out of the optical lithography hat.
Tortured metaphors aside, the goal for the post-tapeout flow is the same… Read More