Contact over Active Gate Process Requirements for 5G

Contact over Active Gate Process Requirements for 5G
by Tom Dillinger on 07-01-2020 at 6:00 am

frequency 5G

Summary
A recent process enhancement in advanced nodes is to support the fabrication of contacts directly on the active gate area of a device.  At the recent VLSI 2020 Symposium, the critical advantages of this capability were highlighted, specifically in the context of the behavior of RF CMOS devices needed for 5G designs.

IntroductionRead More