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Open Source Support for Lithography Simulation

P

pkvlsikuk

New member
Its very hard to find open source support in the area of lithography simulation. There are few links (like http://cuervo.eecs.berkeley.edu/Lava/simulators.htm[FONT=Arial, sans-serif]) where we can get some information about lithography simulation software but not the access for source code.[/FONT]

Please share the links from where we can get some access to open source softwares/codes for lithography simulation.
 
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