Most advanced processes in 200mm wafers

[laurchar]

Some project need low volume, compared to what 300m wafer may offer.
200mm wafer is the best choice, but limited by the process node : often 110nm, although 90nm is also offered by Skywater.
But what is the smallest process node offered in 200mm ? with which foundry ?

Laurent

 

[Xebec]

Curious what the answer is. FWIW ASML has at least one machine that can do below 110nm on 200mm wafers: https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt860n

A few Google sources think UMC has a 90nm fab on 200mm wafers, but I can't find direct evidence of that.

 

[Barnsley]

Curious what the answer is. FWIW ASML has at least one machine that can do below 110nm on 200mm wafers: https://www.asml.com/en/products/duv-lithography-systems/twinscan-xt860n

A few Google sources think UMC has a 90nm fab on 200mm wafers, but I can't find direct evidence of that.

We have customer using ASML stepper for 200mm at the nodes for at least 110nm , I dunno if they do 90nm and below though

 

[hskuo]

200mm 90nm should be available from several foundries. For small volume and high end nodes (less than 65nm), you can try MPW wafers provided by all foundries.