Images of interconnect stack that are suitable for publication?

[jms_embedded]

I am looking for an electron microscopy image of an interconnect stack showing the different metal layers, which I could use in an online article.

Something like this one from Intel's IEDM2017 paper on their 10nm process. I have made an inquiry with Intel, but I'm not too hopeful of hearing back from them. (I've tried dealing with IEEE permissions before, and it's a pain.)

Any suggestions?

 

[Fred Chen]

Creative Commons articles allow open use, with proper citation.

 

[nghanayem]

Failing to find a good picture on wikipedia to cite you could also make a representative cartoon.

 

[jms_embedded]

Creative Commons articles allow open use, with proper citation.

Aha, thanks for the tip; I wasn't expecting there to be CC journal articles out there with SEM images, but found one published under CC-BY:

Bernasconi and Magagnin Review—Ruthenium as Diffusion Barrier Layer in Electronic Interconnects: Current Literature with a Focus on Electrochemical Deposition Methods